发明授权
- 专利标题: Asymmetric InGaAsN vertical cavity surface emitting lasers
- 专利标题(中): 不对称InGaAsN垂直腔表面发射激光器
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申请号: US10106678申请日: 2002-03-25
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公开(公告)号: US06813295B2公开(公告)日: 2004-11-02
- 发明人: Tetsuya Takeuchi , Ying-Lan Chang , David P. Bour , Michael H. Leary , Michael R. T. Tan
- 申请人: Tetsuya Takeuchi , Ying-Lan Chang , David P. Bour , Michael H. Leary , Michael R. T. Tan
- 主分类号: H01S500
- IPC分类号: H01S500
摘要:
Various asymmetric InGaAsN VCSEL structures that are made using an MOCVD process are presented. Use of the asymmetric structure effectively eliminates aluminum contamination of the quantum well active region.
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