发明授权
- 专利标题: Silicon building blocks in integrated circuit packaging
- 专利标题(中): 集成电路封装中的硅积木
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申请号: US10329190申请日: 2002-12-23
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公开(公告)号: US06815256B2公开(公告)日: 2004-11-09
- 发明人: David Gregory Figueroa , Dong Zhong , Yuan-Liang Li , Jiangqi He , Cengiz Ahmet Palanduz
- 申请人: David Gregory Figueroa , Dong Zhong , Yuan-Liang Li , Jiangqi He , Cengiz Ahmet Palanduz
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
An improved silicon building block is disclosed. In an embodiment, the silicon building block has at least two vias through it. The silicon building block is doped and the vias filled with a first material, and, optionally, selected ones of the vias filled instead with a second material. In an alternative embodiment, regions of the silicon building block have metal deposited on them.
公开/授权文献
- US20040119144A1 Silicon building blocks in integrated circuit packaging 公开/授权日:2004-06-24
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