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公开(公告)号:US06815256B2
公开(公告)日:2004-11-09
申请号:US10329190
申请日:2002-12-23
IPC分类号: H01L2144
CPC分类号: H01L23/49827 , H01L23/481 , H01L2224/16 , H01L2924/00014 , H01L2924/01019 , H01L2924/3011 , H01L2224/0401
摘要: An improved silicon building block is disclosed. In an embodiment, the silicon building block has at least two vias through it. The silicon building block is doped and the vias filled with a first material, and, optionally, selected ones of the vias filled instead with a second material. In an alternative embodiment, regions of the silicon building block have metal deposited on them.
摘要翻译: 公开了一种改进的硅结构单元。 在一个实施例中,硅结构块具有通过其的至少两个通孔。 硅结构单元被掺杂,并且通孔填充有第一材料,并且可选地,填充了选定的通孔,而不是用第二材料填充。 在替代实施例中,硅积层的区域具有沉积在其上的金属。
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公开(公告)号:US07205638B2
公开(公告)日:2007-04-17
申请号:US10931497
申请日:2004-08-31
IPC分类号: H01L29/40
CPC分类号: H01L23/49827 , H01L23/481 , H01L2224/16 , H01L2924/00014 , H01L2924/01019 , H01L2924/3011 , H01L2224/0401
摘要: An improved silicon building block is disclosed. In an embodiment, the silicon building block has at least two vias through it. The silicon building block is doped and the vias filled with a first material, and, optionally, selected ones of the vias filled instead with a second material. In an alternative embodiment, regions of the silicon building block have metal deposited on them.
摘要翻译: 公开了一种改进的硅结构单元。 在一个实施例中,硅结构块具有通过其的至少两个通孔。 硅结构单元被掺杂,并且通孔填充有第一材料,并且可选地,填充了选定的通孔,而不是用第二材料填充。 在替代实施例中,硅积层的区域具有沉积在其上的金属。
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