发明授权
US06818487B2 Self-aligned, planarized thin-film transistors, devices employing the same, and methods of fabrication thereof
失效
自对准的平面化薄膜晶体管,采用该晶体管的器件及其制造方法
- 专利标题: Self-aligned, planarized thin-film transistors, devices employing the same, and methods of fabrication thereof
- 专利标题(中): 自对准的平面化薄膜晶体管,采用该晶体管的器件及其制造方法
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申请号: US10631533申请日: 2003-07-31
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公开(公告)号: US06818487B2公开(公告)日: 2004-11-16
- 发明人: Louis L. Hsu , Jack Allan Mandelman , William Robert Tonti , Li-Kong Wang
- 申请人: Louis L. Hsu , Jack Allan Mandelman , William Robert Tonti , Li-Kong Wang
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
A semiconductor device is presented which includes a self-aligned, planarized thin-film transistor which can be used in various integrated circuit devices, such as static random access memory (SRAM) cells. The semiconductor device has a first field-effect transistor and a second field-effect transistor. The second field-effect transistor overlies the first field-effect transistor, and the first field-effect transistor and the second field-effect transistor share a common gate. The second field-effect transistor includes a source and a drain which are self-aligned to the shared gate in a layer of planarized semiconductor material above the first field-effect transistor. In one embodiment, the second field-effect transistor is a thin-film transistor, and the shared gate has a U-shape wrap-around configuration at a body of the thin-film transistor.
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