发明授权
- 专利标题: Electrostatic spring softening in redundant degree of freedom resonators
- 专利标题(中): 静态弹簧软化在冗余自由度的谐振器
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申请号: US10423456申请日: 2003-04-25
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公开(公告)号: US06823734B1公开(公告)日: 2004-11-30
- 发明人: Ken J. Hayworth , Kirill V. Shcheglov , Todd E. Humphreys , A. Dorian Challoner
- 申请人: Ken J. Hayworth , Kirill V. Shcheglov , Todd E. Humphreys , A. Dorian Challoner
- 主分类号: G01P904
- IPC分类号: G01P904
摘要:
The present invention discloses an isolated electrostatic biased resonator gyroscope. The gyroscope includes an isolated resonator having a first and a second differential vibration mode, a baseplate supporting the isolated resonator, a plurality of excitation affixed to the baseplate for exciting the first differential vibration mode, a plurality of sensing electrodes affixed to the baseplate for sensing movement of the gyroscope through the second differential vibration mode and a plurality of bias electrodes affixed to the baseplate for trimming isolation of the resonator and substantially minimizing frequency split between the first and second differential vibration modes. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate with the bias electrodes disposed on the baseplate below.
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