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    STEREO IMAGING MINIATURE ENDOSCOPE WITH SINGLE IMAGING CHIP AND CONJUGATED MULTI-BANDPASS FILTERS
    2.
    发明申请
    STEREO IMAGING MINIATURE ENDOSCOPE WITH SINGLE IMAGING CHIP AND CONJUGATED MULTI-BANDPASS FILTERS 有权
    立体成像微型内窥镜与单片成像芯片和并联多通道滤波器

    公开(公告)号：US20110115882A1

    公开(公告)日：2011-05-19

    申请号：US12946839

    申请日：2010-11-15

    申请人： Hrayr Karnig SHAHINIAN ,  Younsam BAE ,  Harish M MANOHARA ,  Victor E. WHITE ,  Kirill V. SHCHEGLOV ,  Robert S. KOWALCZYK

    发明人： Hrayr Karnig SHAHINIAN ,  Younsam BAE ,  Harish M MANOHARA ,  Victor E. WHITE ,  Kirill V. SHCHEGLOV ,  Robert S. KOWALCZYK

    IPC分类号： H04N13/00 ,  A61B1/07 ,  A61B1/055

    CPC分类号： A61B1/00193 ,  A61B1/00183 ,  A61B1/00188 ,  A61B1/045 ,  A61B1/05 ,  A61B1/0607 ,  A61B1/0638 ,  A61B1/0646 ,  A61B1/0684 ,  H04N13/211 ,  H04N13/214 ,  H04N13/254 ,  H04N13/257

    摘要： A dual objective endoscope for insertion into a cavity of a body for providing a stereoscopic image of a region of interest inside of the body including an imaging device at the distal end for obtaining optical images of the region of interest (ROI), and processing the optical images for forming video signals for wired and/or wireless transmission and display of 3D images on a rendering device. The imaging device includes a focal plane detector array (FPA) for obtaining the optical images of the ROI, and processing circuits behind the FPA. The processing circuits convert the optical images into the video signals. The imaging device includes right and left pupil for receiving a right and left images through a right and left conjugated multi-band pass filters. Illuminators illuminate the ROI through a multi-band pass filter having three right and three left pass bands that are matched to the right and left conjugated multi-band pass filters. A full color image is collected after three or six sequential illuminations with the red, green and blue lights.

    摘要翻译： 一种双目标内窥镜，用于插入到身体的空腔中，用于提供身体内部的感兴趣区域的立体图像，包括在远端处的成像装置，以获得感兴趣区域（ROI）的光学图像，并且处理 用于形成用于有线和/或无线传输的视频信号的光学图像，以及在渲染设备上显示3D图像。 成像装置包括用于获得ROI的光学图像的焦平面检测器阵列（FPA）以及FPA后面的处理电路。 处理电路将光学图像转换成视频信号。 成像装置包括用于通过右和左共轭多带通滤波器接收右图像和左图像的左和右光瞳。 照明器通过具有与右和左共轭多带通滤波器匹配的三个右通道和三通道的多通带滤波器照亮ROI。 在红色，绿色和蓝色灯光下三到六次顺序照明后，会收集全彩图像。

    Multiple internal seal ring micro-electro-mechanical system vacuum packaging method
    3.
    发明授权
    Multiple internal seal ring micro-electro-mechanical system vacuum packaging method 有权
    多内密封环微机电系统真空包装方法

    公开(公告)号：US07396478B2

    公开(公告)日：2008-07-08

    申请号：US11850458

    申请日：2007-09-05

    申请人： Ken J. Hayworth ,  Karl Y. Yee ,  Kirill V. Shcheglov ,  Youngsam Bae ,  Dean V. Wiberg ,  A. Dorian Challoner ,  Chris S. Peay

    发明人： Ken J. Hayworth ,  Karl Y. Yee ,  Kirill V. Shcheglov ,  Youngsam Bae ,  Dean V. Wiberg ,  A. Dorian Challoner ,  Chris S. Peay

    IPC分类号： B44C1/22 ,  H01L21/00

    CPC分类号： G01C19/5719 ,  B81B7/007

    摘要： A Multiple Internal Seal Ring (MISR) Micro-Electro-Mechanical System (MEMS) vacuum packaging method that hermetically seals MEMS devices using MISR. The method bonds a capping plate having metal seal rings to a base plate having metal seal rings by wafer bonding the capping plate wafer to the base plate wafer. Bulk electrodes may be used to provide conductive paths between the seal rings on the base plate and the capping plate. All seals are made using only metal-to-metal seal rings deposited on the polished surfaces of the base plate and capping plate wafers. However, multiple electrical feed-through metal traces are provided by fabricating via holes through the capping plate for electrical connection from the outside of the package through the via-holes to the inside of the package. Each metal seal ring serves the dual purposes of hermetic sealing and providing the electrical feed-through metal trace.

    摘要翻译： 使用MISR密封MEMS器件的多内密封环（MISR）微机电系统（MEMS）真空包装方法。 该方法通过将封盖板晶片与基板晶片结合，将具有金属密封环的封盖板与具有金属密封环的基板结合。 散装电极可用于在基板和封盖板上的密封环之间提供导电路径。 所有密封件仅使用沉积在基板和封盖板晶片的抛光表面上的金属对金属密封环制成。 然而，通过制造通过盖板的通孔来提供多个电馈通金属迹线，用于从封装的外部通过通孔到封装的内部进行电连接。 每个金属密封环都用于气密密封的双重目的，并提供电气馈通金属痕迹。

    Integral resonator gyroscope
    4.
    发明授权
    Integral resonator gyroscope 有权
    积分谐振陀螺仪

    公开(公告)号：US07347095B2

    公开(公告)日：2008-03-25

    申请号：US11199004

    申请日：2005-08-08

    申请人： Kirill V. Shcheglov ,  A. Dorian Challoner ,  Ken J. Hayworth ,  Dean V. Wiberg ,  Karl Y. Yee

    发明人： Kirill V. Shcheglov ,  A. Dorian Challoner ,  Ken J. Hayworth ,  Dean V. Wiberg ,  Karl Y. Yee

    IPC分类号： G01P9/04

    CPC分类号： B81C3/001 ,  G01C19/5684 ,  Y10T29/49002 ,  Y10T29/49007 ,  Y10T29/4902

    摘要： The present invention discloses an inertial sensor having an integral resonator. A typical sensor comprises a planar mechanical resonator for sensing motion of the inertial sensor and a case for housing the resonator. The resonator and a wall of the case are defined through an etching process. A typical method of producing the resonator includes etching a baseplate, bonding a wafer to the etched baseplate, through etching the wafer to form a planar mechanical resonator and the wall of the case and bonding an end cap wafer to the wall to complete the case.

    摘要翻译： 本发明公开了一种具有整体式谐振器的惯性传感器。 典型的传感器包括用于感测惯性传感器的运动的平面机械谐振器和用于容纳谐振器的壳体。 谐振器和壳体的壁通过蚀刻工艺来定义。 制造谐振器的典型方法包括蚀刻基板，将晶片接合到蚀刻的基板上，通过蚀刻晶片以形成平面机械谐振器和壳体的壁并将端盖晶片结合到壁上以完成壳体。

    Isolated resonator gyroscope with compact flexures
    5.
    发明授权
    Isolated resonator gyroscope with compact flexures 有权
    隔离谐振陀螺仪具有紧凑的弯曲

    公开(公告)号：US06955084B2

    公开(公告)日：2005-10-18

    申请号：US10410744

    申请日：2003-04-10

    申请人： A. Dorian Challoner ,  Kirill V. Shcheglov

    发明人： A. Dorian Challoner ,  Kirill V. Shcheglov

    IPC分类号： B81B3/00 ,  G01C19/56 ,  G01P9/04 ,  G01C19/00

    CPC分类号： G01C19/5712 ,  G01P2015/084

    摘要： The present invention discloses a gyroscope comprising an isolated resonator including a post proof mass and counterbalancing plate. One or more double beam flexures each interconnect the counterbalancing plate and the proof mass with a first and a second beam attached to the post proof mass and a third and a fourth beam attached to the counterbalancing plate. A baseplate is affixed to the resonator by the double beam flexures. The counterbalancing plate and the proof mass transfer substantially no net momentum to the baseplate when the resonator is excited.

    摘要翻译： 本发明公开了一种包括隔离谐振器的陀螺仪，该谐振器包括后验质量块和平衡板。 一个或多个双梁弯曲部分每个互连平衡板和检验质量块，第一和第二梁连接到防反射质量块，第三和第四梁连接在平衡板上。 通过双梁弯曲将基板固定在谐振器上。 当谐振器被激发时，平衡板和证明质量传递基本上没有到底板的净动量。

    Split-resonator integrated-post MEMS gyroscope
    6.
    发明授权
    Split-resonator integrated-post MEMS gyroscope 有权
    分体谐振器一体式后置MEMS陀螺仪

    公开(公告)号：US06796179B2

    公开(公告)日：2004-09-28

    申请号：US10441892

    申请日：2003-05-16

    申请人： Youngsam Bae ,  Ken J. Hayworth ,  Kirill V. Shcheglov

    发明人： Youngsam Bae ,  Ken J. Hayworth ,  Kirill V. Shcheglov

    IPC分类号： G01P904

    CPC分类号： G01C19/5719

    摘要： A split-resonator integrated-post vibratory microgyroscope may be fabricated using micro electrical mechanical systems (MEMS) fabrication techniques. The microgyroscope may include two gyroscope sections bonded together, each gyroscope section including resonator petals, electrodes, and an integrated half post. The half posts are aligned and bonded to act as a single post.

    摘要翻译： 可以使用微电机械系统（MEMS）制造技术来制造分裂谐振器一体式振动式微陀螺仪。 微型陀螺仪可以包括两个结合在一起的陀螺仪部分，每个陀螺仪部分包括谐振瓣，电极和一体化的半柱。 半职位是对齐和绑定的，以作为单一职位。

    Method of fabricating a mesoscaled resonator
    8.
    发明授权
    Method of fabricating a mesoscaled resonator 有权
    制造中尺度谐振器的方法

    公开(公告)号：US07624494B2

    公开(公告)日：2009-12-01

    申请号：US11610418

    申请日：2006-12-13

    申请人： A. Dorian Challoner ,  Kirill V. Shcheglov

    发明人： A. Dorian Challoner ,  Kirill V. Shcheglov

    IPC分类号： G01R3/00

    CPC分类号： G01C19/5684 ,  Y10T29/435 ,  Y10T29/49002 ,  Y10T29/49007 ,  Y10T29/4902

    摘要： An inertial sensor includes a mesoscaled disc resonator comprised of micro-machined substantially thermally non-conductive wafer with low coefficient of thermal expansion for sensing substantially in-plane vibration, a rigid support coupled to the resonator at a central mounting point of the resonator, at least one excitation electrode within an interior of the resonator to excite internal in-plane vibration of the resonator, and at least one sensing electrode within the interior of the resonator for sensing the internal in-plane vibration of the resonator. The inertial sensor is fabricated by etching a baseplate, bonding the substantially thermally non-conductive wafer to the etched baseplate, through-etching the wafer using deep reactive ion etching to form the resonator, depositing a thin conductive film on the through-etched wafer. The substantially thermally non-conductive wafer may comprise a silicon dioxide glass wafer, which is a silica glass wafer or a borosilicate glass wafer, or a silicon-germanium wafer.

    摘要翻译： 惯性传感器包括中等尺寸的光盘谐振器，其包括具有低热膨胀系数的微加工的基本上不导热的晶片，用于感测基本上面内的振动，在谐振器的中心安装点处耦合到谐振器的刚性支撑件， 在谐振器内部的至少一个激励电极，以激发谐振器的内部平面内振动，以及谐振器内部的至少一个感测电极，用于感测谐振器的内部平面内振动。 通过蚀刻基板，将基本上不导热的晶片结合到蚀刻的基板上，通过使用深反应离子蚀刻蚀刻晶片以形成谐振器，在经过蚀刻的晶片上沉积薄导电膜来制造惯性传感器。 基本上不导热的晶片可以包括二氧化硅玻璃晶片，其是石英玻璃晶片或硼硅酸盐玻璃晶片或硅 - 锗晶片。

    Method of producing an inertial sensor
    9.
    发明授权
    Method of producing an inertial sensor 有权
    制造惯性传感器的方法

    公开(公告)号：US07401397B2

    公开(公告)日：2008-07-22

    申请号：US11371596

    申请日：2006-03-09

    申请人： Kirill V. Shcheglov ,  A. Dorian Challoner

    发明人： Kirill V. Shcheglov ,  A. Dorian Challoner

    IPC分类号： G01R3/00

    CPC分类号： G01C19/5684 ,  Y10T29/49002 ,  Y10T29/49005 ,  Y10T29/49007 ,  Y10T29/4908 ,  Y10T29/49128 ,  Y10T29/49155

    摘要： The present invention discloses an inertial sensor comprising a planar mechanical resonator with embedded sensing and actuation for substantially in-plane vibration and having a central rigid support for the resonator. At least one excitation or torquer electrode is disposed within an interior of the resonator to excite in-plane vibration of the resonator and at least one sensing or pickoff electrode is disposed within the interior of the resonator for sensing the motion of the excited resonator. In one embodiment, the planar resonator includes a plurality of slots in an annular pattern; in another embodiment, the planar mechanical resonator comprises four masses; each embodiment having a simple degenerate pair of in-plane vibration modes.

    摘要翻译： 本发明公开了一种惯性传感器，其包括具有用于基本上面内振动的嵌入式感测和致动的平面机械谐振器，并具有用于谐振器的中心刚性支撑。 在谐振器的内部设置至少一个激励或扭曲电极以激发谐振器的平面内振动，并且至少一个感测或拾取电极设置在谐振器内部以感测被激励的谐振器的运动。 在一个实施例中，平面谐振器包括环形图案中的多个槽; 在另一个实施例中，平面机械谐振器包括四个质量块; 每个实施例具有简单的退化对的平面内振动模式。

    Isolated resonator gyroscope with isolation trimming using a secondary element
    10.
    发明授权
    Isolated resonator gyroscope with isolation trimming using a secondary element 有权

    公开(公告)号：US06990863B2

    公开(公告)日：2006-01-31

    申请号：US10423459

    申请日：2003-04-25

    申请人： A. Dorian Challoner ,  Kirill V. Shcheglov

    发明人： A. Dorian Challoner ,  Kirill V. Shcheglov

    IPC分类号： G01N9/04

    CPC分类号： G01C19/5719

    摘要： The present invention discloses a resonator gyroscope including an isolated resonator. One or more flexures support the isolated resonator and a baseplate is affixed to the resonator by the flexures. Drive and sense elements are affixed to the baseplate and used to excite the resonator and sense movement of the gyroscope. In addition, at least one secondary element (e.g., another electrode) is affixed to the baseplate and used for trimming isolation of the resonator. The resonator operates such that it transfers substantially no net momentum to the baseplate when the resonator is excited. Typically, the isolated resonator comprises a proof mass and a counterbalancing plate.