发明授权
US06825539B2 Integrated circuit-integrated flexible shear-stress sensor skin and method of fabricating the same 失效
集成电路集成柔性剪切应力传感器皮肤及其制造方法

  • 专利标题: Integrated circuit-integrated flexible shear-stress sensor skin and method of fabricating the same
  • 专利标题(中): 集成电路集成柔性剪切应力传感器皮肤及其制造方法
  • 申请号: US10403732
    申请日: 2003-03-31
  • 公开(公告)号: US06825539B2
    公开(公告)日: 2004-11-30
  • 发明人: Yu-Chong TaiYong Xu
  • 申请人: Yu-Chong TaiYong Xu
  • 主分类号: H01L2100
  • IPC分类号: H01L2100
Integrated circuit-integrated flexible shear-stress sensor skin and method of fabricating the same
摘要:
An IC-integrated, flexible, shear-stress sensor skin is made by providing a wafer with integrated circuits and sensor elements which are fabricated in the wafer, disposing a first polymer layer on the wafer and sensor elements to provide mechanical support for the sensor elements, defining a cavity below the sensor elements to provide thermal isolation, while the sensor element remains supported by the first polymer layer, and isolating the sensor elements into a plurality of islands defined in the wafer, so that the islands, with at least one sensor element on at least one of the islands, and the integrated circuits form the IC-integrated, flexible, shear-stress sensor skin. The invention is an IC-integrated, flexible, sensor skin made according to the method.
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