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US06828684B2 Semiconductor device and method of manufacturing the same 失效
半导体装置及其制造方法

Semiconductor device and method of manufacturing the same
摘要:
There is provided a semiconductor device including a semiconductor substrate and a conductive layer above the semiconductor substrate, wherein the conductive layer contains copper, a surface region of the conductive layer contains at least one of C—H bonds and C—C bonds, and a total amount of C atoms forming the C—H bonds and C atoms forming the C—C bonds in the surface region is 30 atomic % or more of a whole amount of elements in the surface region.
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