发明授权
- 专利标题: Bistable microelectromechanical system based structures, systems and methods
- 专利标题(中): 双稳态微机电系统的结构,系统和方法
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申请号: US10063762申请日: 2002-05-10
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公开(公告)号: US06828887B2公开(公告)日: 2004-12-07
- 发明人: Joel A. Kubby , Fuqian Yang , Jun Ma , Kristine A. German , Peter M. Gulvin
- 申请人: Joel A. Kubby , Fuqian Yang , Jun Ma , Kristine A. German , Peter M. Gulvin
- 主分类号: H01H5122
- IPC分类号: H01H5122
摘要:
A bistable microelectromechanical system (MEMS) based system comprises a micromachined beam having a first stable state, in which the beam is substantially stress-free and has a specified non-linear shape, and a second stable state. The curved shape may comprises a simple curve or a compound curve. In embodiments, the boundary conditions for the beam are fixed boundary conditions, bearing boundary conditions, spring boundary conditions, or a combination thereof. The system may further comprise an actuator arranged to move the beam between the first and second stable states and a movable element that is moved between a first position and a second position in accordance with the movement of the beam between the first and second stable states. The actuator may comprise one of a thermal actuator, an electrostatic actuator, a piezoelectric actuator and a magnetic actuator. The actuator may further comprise a thermal impact actuator or a zippering electrostatic actuator.