Invention Grant
- Patent Title: Microelectromechanical system with stiff coupling
-
Application No.: US10099464Application Date: 2002-03-14
-
Publication No.: US06831390B2Publication Date: 2004-12-14
- Inventor: Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
- Applicant: Samuel Lee Miller , Stephen Matthew Barnes , Murray Steven Rodgers
- Main IPC: G02B2608
- IPC: G02B2608

Abstract:
A microelectromechanical system is disclosed that uses a stiff tether between an actuator assembly and a lever that is interconnected with an appropriate substrate such that a first end of the lever may move relative to the substrate, depending upon the direction of motion of the actuator assembly. Any appropriate load may be interconnected with the lever, including a mirror for any optical application.
Public/Granted literature
- US20030173865A1 Microelectromechanical system with stiff coupling Public/Granted day:2003-09-18
Information query