Invention Grant
- Patent Title: Loading and unloading station for semiconductor processing installations
- Patent Title (中): 半导体加工设备的装卸站
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Application No.: US10460698Application Date: 2003-06-12
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Publication No.: US06837663B2Publication Date: 2005-01-04
- Inventor: Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
- Applicant: Andreas Mages , Werner Scheler , Herbert Blaschitz , Alfred Schulz , Heinz Schneider
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Richard Pickreign
- Priority: DE19511024 19950328; DE19542646 19951115
- Main IPC: B65D85/86
- IPC: B65D85/86 ; B65G1/00 ; B65G49/00 ; B65G49/07 ; H01L21/00 ; H01L21/673 ; H01L21/677

Abstract:
In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
Public/Granted literature
- US20030206795A1 Loading and unloading station for semiconductor processing installations Public/Granted day:2003-11-06
Information query
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