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公开(公告)号：US06461094B1
公开(公告)日：2002-10-08
申请号：US09496865
申请日：2000-02-02
IPC分类号： B65G4907
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
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公开(公告)号：US06375403B1
公开(公告)日：2002-04-23
申请号：US09497057
申请日：2000-02-02
IPC分类号： B65G4907
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by means of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
摘要翻译： 在半导体加工装置的装载和卸载站中，本发明的目的是确保在洁净室条件下运输容器的充电。 这些运输容器本身用作盘形物体的杂志并且横向敞开。 还可以任选地加载和卸载更多量的这种运输容器，其中运输容器的更换必须在有利的人体工程学条件下进行。 根据本发明，用于装载，卸载和重新装载盘形物体的运输容器通过具有密封件的容器盖以固定的方式联接在一起。 充电开口和输送容器同时打开，因为容器盖和封闭件共同向下移动到半导体处理装置中。 装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。 本发明可应用于集成电路的制造。
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公开(公告)号：US06000732A
公开(公告)日：1999-12-14
申请号：US649263
申请日：1996-05-17
申请人： Werner Scheler , Karl Schubert , Andreas Mages , Andreas Anton
发明人： Werner Scheler , Karl Schubert , Andreas Mages , Andreas Anton
IPC分类号： E05C9/06 , E05C9/04 , H01L21/673 , E05C5/00
CPC分类号： H01L21/67373 , Y10T292/0805 , Y10T292/0892
摘要： An arrangement for locking and unlocking a door of a container for increasing operating reliability when locking and unlocking in a simple manner and for ensuring an opening and closing of the transport container in automated operation. Particle generation is reduced at the same time. Locking elements within a door, which can move in and out, penetrate into recesses of the container to be closed when moved out along a curved path. The arrangement is particularly applicable in transport containers for wafer-shaped objects of larger diameter, in which removal and charging are effected individually in a plane parallel to the surface of the wafer-shaped object and whose container cover is removed and inserted laterally.
摘要翻译： 用于锁定和解锁容器的门的装置，用于在以简单的方式锁定和解锁时提高操作可靠性，并且用于确保自动操作中的运输容器的打开和关闭。 同时减少颗粒生成。 可以进出的门内的锁定元件沿着弯曲的路径移出时，穿过容器的凹部以被关闭。 该装置特别适用于较大直径的晶圆形物体的运输容器，其中在与晶片形物体的表面平行的平面内分别进行移除和加料，并且其容器盖被横向插入。
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公开(公告)号：US5772386A
公开(公告)日：1998-06-30
申请号：US615386
申请日：1996-03-14
IPC分类号： B65D85/86 , B65G1/00 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
摘要翻译： 在半导体加工装置的装载和卸载站中，本发明的目的是确保在洁净室条件下运输容器的充电。 这些运输容器本身用作盘形物体的杂志并且横向敞开。 还可以任选地加载和卸载更多量的这种运输容器，其中运输容器的更换必须在有利的人体工程学条件下进行。 根据本发明，用于装载，卸载和重新装载盘形物体的运输容器通过使用粘合接合的具有封闭件的容器盖以固定的方式联接。 充电开口和输送容器同时打开，因为容器盖和封闭件共同向下移动到半导体处理装置中。 装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。 本发明可应用于集成电路的制造。
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5.发明授权Device for handling disk-shaped objects in a handling plane of a local clean room 失效用于在当地洁净室的处理平面处理盘形物体的装置
公开(公告)号：US5642978A
公开(公告)日：1997-07-01
申请号：US656698
申请日：1996-06-03
申请人： Berndt Lahne , Klaus Schultz , Werner Scheler , Michael Heitmann , Axel Gaglin
发明人： Berndt Lahne , Klaus Schultz , Werner Scheler , Michael Heitmann , Axel Gaglin
IPC分类号： H01L21/00 , H01L21/677
CPC分类号： H01L21/67265 , H01L21/67017 , H01L21/67766 , Y10S414/137
摘要： A device for handling disk-shaped objects in a handling plane of a local clean room has the object of ensuring process steps preceding or following the processing and inspection of the disk-shaped objects under the conditions of a local clean room with the use of SMIF boxes. The handling plane (H--H) is in a fixed constructional relationship with a reference plane (E--E) of at least one device comprising the magazine seat as a component part, which device serves to index the shelves of magazines and disk-shaped objects contained therein and is arranged above an intermediate base dividing the clean room into two partial spaces located one above the other, in which an air flow component of an air flow is directed from the partial space above the intermediate base into the partial space below the intermediate base. The device can be used in the manufacture of integrated circuits, particularly for handling tasks.
摘要翻译： 在本地洁净室的处理平面中处理盘状物体的装置的目的是确保在使用SMIF的局部洁净室的条件下对盘状物体进行处理和检查之前或之后的处理步骤 盒子 处理平面（HH）与至少一个装置的参考平面（EE）处于固定的结构关系，该装置包括作为组成部分的盒式座椅，该装置用于对包含在其中的杂志和盘形物体的架子进行索引， 被布置在将洁净室分成两个彼此上下的局部空间的中间基座的上方，其中空气流的空气流分量从中间基座上方的部分空间引导到中间基座下方的部分空间。 该器件可用于集成电路的制造，特别是用于处理任务。
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公开(公告)号：US4583847A
公开(公告)日：1986-04-22
申请号：US631388
申请日：1984-07-16
申请人： Udo Battig , Peter Dittrich , Norbert Oertel , Gunter Osterland , Mathias Rucknagel , Werner Scheler , Klaus Schultz
发明人： Udo Battig , Peter Dittrich , Norbert Oertel , Gunter Osterland , Mathias Rucknagel , Werner Scheler , Klaus Schultz
CPC分类号： H01L21/6838 , G01B11/002 , G01B5/0004 , G03F7/70716 , G03F7/70775 , H01L21/681
摘要： The invention relates to an improvement for a wafer mounting table particularly for use in photolithographic apparatus for processing wafers comprising a compact mounting block made of glass-ceramics which has two neighboring back supports limiting two sides of a top face of said mounting block. The top face is provided with at least three studs for supporting a wafer to be processed. The sides of the back-supports facing away from said top face are provided with an elongated horizontally extending silvered area each, which is in opposition to a laser path measuring system each. The laser beams of said laser path measuring system define a plane which coincides with a projection plane of a projection lens being provided in opposition to a wafer mounted on said studs. Means are provided for substantially eliminating departures of the silvered areas from a straight plane. Further means are provided which enable a quick adaption of the laser mount for wafer charges having different thicknesses or diameters.
摘要翻译： 本发明涉及一种用于晶片安装台的改进，其特别适用于用于处理晶片的光刻设备，其包括由玻璃陶瓷制成的紧凑型安装块，其具有限制所述安装块的顶面的两侧的两个相邻的后支撑。 顶面设置有至少三个支柱，用于支撑待加工的晶片。 背面支撑物背离所述顶面的侧面设置有细长的水平延伸的镀银区域，每个都与激光路径测量系统相对立。 所述激光路径测量系统的激光束限定了与投影透镜的投影平面重合的平面，所述投影平面与安装在所述螺柱上的晶片相对。 提供了用于基本上消除镀银区域从直线平面偏离的装置。 提供了进一步的装置，其能够快速适应具有不同厚度或直径的晶片电荷的激光装置。
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公开(公告)号：US6071059A
公开(公告)日：2000-06-06
申请号：US3025
申请日：1998-01-05
IPC分类号： B65D85/86 , B65G1/00 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using of an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
摘要翻译： 在半导体加工装置的装载和卸载站中，本发明的目的是确保在洁净室条件下运输容器的充电。 这些运输容器本身用作盘形物体的杂志并且横向敞开。 还可以任选地加载和卸载更多量的这种运输容器，其中运输容器的更换必须在有利的人体工程学条件下进行。 根据本发明，用于装载，卸载和重新装载盘形物体的运输容器通过使用粘合接合的具有封闭件的容器盖以固定的方式联接。 充电开口和输送容器同时打开，因为容器盖和封闭件共同向下移动到半导体处理装置中。 装载和卸载是通过布置在半导体加工装置中的操纵装置通过装填开口接合到输送容器中而实现的。 本发明可应用于集成电路的制造。
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8.发明授权
公开(公告)号：US5636724A
公开(公告)日：1997-06-10
申请号：US396673
申请日：1995-03-01
申请人： Werner Scheler , Juergen Graefe , Andreas Mages , Andreas Birkner , Erich Adler
发明人： Werner Scheler , Juergen Graefe , Andreas Mages , Andreas Birkner , Erich Adler
IPC分类号： B65G49/07 , H01L21/677 , H01R13/24 , H01R41/00 , B65G47/24
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/14
摘要： The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.
摘要翻译： 用于在两个终端位置之间传送传输对象的设备的目的是在确保高度灵活的传送的同时，在可靠性和洁净室条件以及冗长的传输路径中排除负面影响。 为了控制用于传送的驱动器的可移动部分的传感器和致动器的操作，这些传感器和致动器之间的电接触以及位于驱动器的静止部分中的供应单元仅在两个端部位置进行。 该器件特别用于制造半导体，例如用于对半导体加工机进行充电，但不限于此。
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公开(公告)号：US06837663B2
公开(公告)日：2005-01-04
申请号：US10460698
申请日：2003-06-12
IPC分类号： B65D85/86 , B65G1/00 , B65G49/00 , B65G49/07 , H01L21/00 , H01L21/673 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67769 , H01L21/67772 , Y10S414/137 , Y10S414/138 , Y10S414/139 , Y10S414/14
摘要： In a loading and unloading station for semiconductor processing installations, the object of the present invention is to ensure charging proceeding from transporting containers under clean room conditions. These transporting containers themselves serve as magazines for disk-shaped objects and are open laterally. It should also be possible, optionally, to load and unload a greater quantity of such transporting containers, wherein the exchange of transporting containers must be effected under favorable ergonomic conditions. According to the invention, the transporting container for loading, unloading and reloading of disk-shaped objects is coupled in a stationary manner by the container cover with the closure by using an adhering engagement. The charging opening and the transporting container are opened simultaneously in that the container cover and the closure are moved down jointly into the semiconductor processing installation. The loading and unloading is carried out in that a manipulating device which is arranged in the semiconductor processing installation engages through the charging opening into the transporting container. The invention is applicable in the manufacturing of integrated circuits.
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公开(公告)号：US5715929A
公开(公告)日：1998-02-10
申请号：US430407
申请日：1995-04-28
IPC分类号： B65G49/07 , H01L21/677 , B65G47/24
CPC分类号： H01L21/67781 , Y10S414/14
摘要： The object of a charging device for semiconductor processing installations is to increase the flexibility of the charging process while excluding negative influences on dependability and clean room conditions. At least in a portion of the movement of a linearly movable part which is supported by a stationary part of a drive for transferring a transport object between two end positions, a gripper for the transport object being attached to the movable part, a rotating movement of the gripper is combined with the linear movement. The device is provided in particular for use in the fabrication of semiconductors.
摘要翻译： 用于半导体处理装置的充电装置的目的是增加充电过程的灵活性，同时排除对可靠性和洁净室条件的不利影响。 至少在由用于在两个端部位置之间传送运输物体的驱动器的固定部分支撑的线性可移动部分的运动的一部分中，用于输送物体的夹持器附接到可移动部件，旋转运动 夹具与线性运动相结合。 该器件特别用于制造半导体。
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