发明授权
- 专利标题: Apparatus and method for cleaning test probes
- 专利标题(中): 测试探针清洗装置及方法
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申请号: US10050908申请日: 2002-01-18
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公开(公告)号: US06840374B2公开(公告)日: 2005-01-11
- 发明人: Igor Y. Khandros , Benjamin N. Eldridge , Treliant Fang , Gaetan L. Mathieu , Gary W. Grube , Michael A. Drush , Christopher C. Buckholtz
- 申请人: Igor Y. Khandros , Benjamin N. Eldridge , Treliant Fang , Gaetan L. Mathieu , Gary W. Grube , Michael A. Drush , Christopher C. Buckholtz
- 主分类号: A47L25/00
- IPC分类号: A47L25/00 ; B08B1/00 ; B08B7/00 ; C08L83/05 ; C08L83/07 ; C08L83/08 ; G01R1/067 ; G01R3/00 ; H01L21/304 ; H01L21/66 ; B65D69/00 ; B32B5/00 ; B32B9/04
摘要:
A probe cleaning apparatus for cleaning a probe tip use to test semiconductors dies having an abrasive substrate layer an a tacky gel layer on top of the abrasive surface of the abrasive substrate layer. The probe tip is cleaned by passing it through the tacky gel layer so that it comes in contact with the abrasive surface of the abrasive substrate, moving the probe tip across the abrasive surface of the substrate layer, and then removing the probe tip from the successive layers of the cleaning apparatus. The probe tip emerges from the cleaning apparatus free from debris associated with testing the semiconductor dies.
公开/授权文献
- US20030138644A1 Apparatus and method for cleaning test probes 公开/授权日:2003-07-24
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