发明授权
US06841816B2 Vertical color filter sensor group with non-sensor filter and method for fabricating such a sensor group
有权
具有非传感器滤波器的垂直滤色器传感器组以及用于制造这种传感器组的方法
- 专利标题: Vertical color filter sensor group with non-sensor filter and method for fabricating such a sensor group
- 专利标题(中): 具有非传感器滤波器的垂直滤色器传感器组以及用于制造这种传感器组的方法
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申请号: US10355940申请日: 2003-01-31
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公开(公告)号: US06841816B2公开(公告)日: 2005-01-11
- 发明人: Richard B. Merrill , Richard F. Lyon , Richard M. Turner , Robert S. Hannebauer , Russel A. Martin
- 申请人: Richard B. Merrill , Richard F. Lyon , Richard M. Turner , Robert S. Hannebauer , Russel A. Martin
- 申请人地址: US CA Santa Clara
- 专利权人: Foveon, Inc.
- 当前专利权人: Foveon, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Girard & Equitz LLP
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L27/146 ; H01L27/148 ; H01L31/00 ; H01L31/0216 ; H01L31/107 ; H01L31/113 ; H01L33/00
摘要:
A vertical color filter sensor group formed on a substrate (preferably a semiconductor substrate) and including at least two vertically stacked, photosensitive sensors. In preferred embodiments, the sensor group includes at least one filter positioned relative to the sensors such that radiation that has propagated through or reflected from the filter will propagate into at least one sensor. Preferably, the filter is or includes a layer that has been integrated with the sensors by a semiconductor integrated circuit fabrication process. In other embodiments, the sensor group includes a micro-lens. Other aspects of the invention are arrays of vertical color filter sensor groups, some or all of which include at least one filter or micro-lens, and methods for fabricating vertical color filter sensor groups and arrays thereof.
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