发明授权
US06841877B2 Semiconductor device, metal laminated plate for fabricating circuit on semiconductor, and method of fabricating circuit
失效
半导体装置,用于制造半导体电路的金属层压板以及制造电路的方法
- 专利标题: Semiconductor device, metal laminated plate for fabricating circuit on semiconductor, and method of fabricating circuit
- 专利标题(中): 半导体装置,用于制造半导体电路的金属层压板以及制造电路的方法
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申请号: US10169917申请日: 2000-12-26
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公开(公告)号: US06841877B2公开(公告)日: 2005-01-11
- 发明人: Kinji Saijo , Kazuo Yoshida , Hiroaki Okamoto , Shinji Ohsawa
- 申请人: Kinji Saijo , Kazuo Yoshida , Hiroaki Okamoto , Shinji Ohsawa
- 申请人地址: JP Tokyo
- 专利权人: Toyo Kohan Co., Ltd.
- 当前专利权人: Toyo Kohan Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Browdy and Neimark, P.L.L.C.
- 优先权: JP2000-004041 20000112
- 国际申请: PCTJP00/09255 WO 20001226
- 国际公布: WO0152322 WO 20010719
- 主分类号: H01L21/3213
- IPC分类号: H01L21/3213 ; H01L21/28 ; H01L21/3205 ; H01L21/60 ; H01L21/768 ; H01L23/52 ; H01L23/48 ; H01L21/44
摘要:
A means for highly precisely and economically fabricating wiring on a semiconductor and highly precisely and economically forming a bump on an electrodes. (1) A semiconductor device comprising a semiconductor, a metal foil for fabricating wiring and conductor wiring on the semiconductor, and a method of fabricating a conductor wiring circuit on a semiconductor, comprising the steps of laying a metal foil for fabricating wiring on the electrode-forming side of the semiconductor, forming a resist wiring pattern by photo-etching the metal foil, etching the metal foil, and removing the resist to form the wiring. (2) A semiconductor device which comprises a multilayer metal foil for fabricating wiring in place of the metal foil for forming wiring of the semiconductor device described in (1); and a method of fabricating conductor wiring having a bump on a semiconductor, comprising the steps of the method described in (1) and further comprising the steps of forming a resist pattern for forming the bump by photo-etching the multilayer metal foil for forming the wiring, forming a bump by selective etching, and removing an etch-stop layer.
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