发明授权
US06849207B2 Silicon nitride sintered material and production process thereof 有权
氮化硅烧结材料及其制造方法

Silicon nitride sintered material and production process thereof
摘要:
A silicon nitride sintered material containing a silicon nitride component and silicon carbide having an average particle size of 1 μm or less in an amount of at least 1 mass % and less than 4 mass %, based on 100 mass % of the silicon nitride component. The carbide is dispersed in the silicon nitride component, and the silicon nitride sintered material has a thermal expansion coefficient of at least 3.7 ppm/° C. between room temperature and 1,000° C. The silicon nitride component contains a rare earth element in an amount of 15-25 mass % as reduced to a certain oxide thereof and Cr in an amount of 5-10 mass % as reduced to a certain oxide thereof, and a crystalline phase is present in intergrain regions of the sintered material.
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