- 专利标题: Flexural plate wave sensor and array
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申请号: US10324685申请日: 2002-12-19
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公开(公告)号: US06851297B2公开(公告)日: 2005-02-08
- 发明人: Brian T. Cunningham , John Williams
- 申请人: Brian T. Cunningham , John Williams
- 申请人地址: US MA Cambridge
- 专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人: The Charles Stark Draper Laboratory, Inc.
- 当前专利权人地址: US MA Cambridge
- 代理机构: Iandiorio & Teska
- 主分类号: G01N29/02
- IPC分类号: G01N29/02 ; G01N29/22 ; H01L21/02
摘要:
A method for manufacturing a flexural plate wave sensor includes the steps of depositing an etch-stop layer over a substrate, depositing a membrane layer over the etch stop layer, depositing a piezoelectric layer over the membrane layer, forming a first transducer on the piezoelectric layer and forming a second transducer on the piezoelectric layer, spaced from the first transducer. The method further includes the steps of etching a cavity through the substrate, the cavity having substantially parallel interior walls, removing the portion of the etch stop layer between the cavity and the membrane layer to expose a portion of the membrane layer, and depositing an absorptive coating on the exposed portion of the membrane layer.
公开/授权文献
- US20030200823A1 Flexural plate wave sensor and array 公开/授权日:2003-10-30
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