Invention Grant
- Patent Title: Semiconductor device having a low dielectric constant dielectric material and process for its manufacture
- Patent Title (中): 具有低介电常数介电材料的半导体器件及其制造方法
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Application No.: US10435561Application Date: 2003-05-09
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Publication No.: US06852648B2Publication Date: 2005-02-08
- Inventor: Omkaram Nalamasu , Chien-Shing Pai , Elsa Reichmanis , Shu Yang
- Applicant: Omkaram Nalamasu , Chien-Shing Pai , Elsa Reichmanis , Shu Yang
- Applicant Address: US PA Allentown
- Assignee: Agere Systems Inc.
- Current Assignee: Agere Systems Inc.
- Current Assignee Address: US PA Allentown
- Agency: Lerner, David, Littenberg Krumholz & Mentlik, LLP
- Main IPC: C08G77/442
- IPC: C08G77/442 ; C08L71/02 ; C09D183/04 ; H01L21/312 ; H01L21/768 ; H01L21/31 ; H01L21/469

Abstract:
A process for fabricating an integrated semiconductor device with a low dielectric constant material and an integrated semiconductor device with the low dielectric constant material interposed between two conductors is disclosed. The low dielectric constant material has a dielectric constant of less than about 2.8. The low dielectric constant material is a porous glass material with an average pore size of less than about 10 nm. The low dielectric constant material is formed on a semiconductor substrate with circuit lines thereover by combining an uncured and unmodified glass resin with an amphiphilic block copolymer. The amphiphilic block copolymer is miscible in the uncured glass resin. The mixture is applied onto the semiconductor substrate and the glass resin is cured. The glass resin is further processed to decompose or otherwise remove residual block copolymer from the cured glass resin.
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