发明授权
- 专利标题： Method and apparatus for treating substrates
- 专利标题（中）： 处理基材的方法和设备
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申请号： US09913986申请日： 2000-01-19
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公开(公告)号： US06858088B1公开(公告)日： 2005-02-22
- 发明人: Peter Dress , Karl Appich , Peter Krauss , Jakob Szekeresch , Robert Weihing
- 申请人： Peter Dress , Karl Appich , Peter Krauss , Jakob Szekeresch , Robert Weihing
- 申请人地址： DE Sternenfels
- 专利权人： Steag Hama Tech AG
- 当前专利权人： Steag Hama Tech AG
- 当前专利权人地址： DE Sternenfels
- 代理机构： R W Becker & Associates
- 代理商 R W Becker
- 优先权： DE19906398 19990216
- 国际申请： PCTEP00/00380 WO 20000119
- 国际公布： WO0048744 WO 20000824
- 主分类号： B05D1/40
- IPC分类号： B05D1/40 ; B05C11/08 ; B05D3/10 ; G03F7/16 ; H01L21/00 ; H01L21/027 ; C23C16/00 ; C23F1/00 ; H01L21/306
摘要：
To achieve a uniform coating of a substrate, with an apparatus and a method for coating substrates, according to which the substrate is supported on a substrate holder in such a way that a substrate surface that is to be coated is exposed, and the substrate is rotated together with the substrate holder, a cover can be secured to the substrate holder and together with the substrate holder forms a sealed chamber for the substrate.
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