发明授权
US06861307B2 Fully isolated dielectric memory cell structure for a dual bit nitride storage device and process for making same
有权
用于双位氮化物存储器件的完全隔离的介电存储器单元结构及其制造方法
- 专利标题: Fully isolated dielectric memory cell structure for a dual bit nitride storage device and process for making same
- 专利标题(中): 用于双位氮化物存储器件的完全隔离的介电存储器单元结构及其制造方法
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申请号: US10631199申请日: 2003-07-31
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公开(公告)号: US06861307B2公开(公告)日: 2005-03-01
- 发明人: Wei Zheng , Mark W. Randolph , Nicholas H. Tripsas , Zoran Krivokapic , Jack F. Thomas , Mark T. Ramsbey
- 申请人: Wei Zheng , Mark W. Randolph , Nicholas H. Tripsas , Zoran Krivokapic , Jack F. Thomas , Mark T. Ramsbey
- 申请人地址: US CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Renner, Otto, Boisselle & Skylar, LLP
- 主分类号: H01L21/28
- IPC分类号: H01L21/28 ; H01L29/51 ; H01L29/792 ; H01L21/8238
摘要:
A method of fabricating a dual bit dielectric memory cell structure on a silicon substrate includes implanting buried bit lines within the substrate and fabricating a layered island on the surface of the substrate between the buried bit lines. The island has a perimeter defining a gate region, and comprises a tunnel dielectric layer on the surface of the silicon on insulator wafer, an isolation barrier dielectric layer on the surface of the tunnel dielectric layer, a top dielectric layer on the surface of the isolation barrier dielectric layer, and a polysilicon gate on the surface of the top dielectric layer. A portion of the isolation barrier dielectric layer is removed to form an undercut region within the gate region and a charge trapping material is deposited within the undercut region.
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