发明授权
US06864106B1 Method and system for detecting tunnel oxide encroachment on a memory device
有权
用于检测存储器件上隧道氧化物侵蚀的方法和系统
- 专利标题: Method and system for detecting tunnel oxide encroachment on a memory device
- 专利标题(中): 用于检测存储器件上隧道氧化物侵蚀的方法和系统
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申请号: US10217965申请日: 2002-08-12
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公开(公告)号: US06864106B1公开(公告)日: 2005-03-08
- 发明人: Zhigang Wang , Nian Yang , Xin Guo
- 申请人: Zhigang Wang , Nian Yang , Xin Guo
- 申请人地址: US CA Sunnyvale
- 专利权人: Advanced Micro Devices, Inc.
- 当前专利权人: Advanced Micro Devices, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 主分类号: G01R31/26
- IPC分类号: G01R31/26 ; G11C29/50 ; H01L21/66 ; G01R27/28
摘要:
A method for detecting tunnel oxide encroachment on a memory device. In one method embodiment, the present invention applies a baseline voltage burst to a gate of the memory device. Next, the present embodiment generates a baseline performance distribution graph of bit line current as a function of gate voltage for the memory device. The present embodiment then applies a channel program voltage burst to the gate of the memory device. Moreover, the present embodiment generates a channel program performance distribution graph of bit line current as a function of gate voltage for the memory device. The present embodiment then applies a channel erase voltage burst to the gate of the memory device. Additionally, the present embodiment generates a channel erase performance distribution graph of bit line current as a function of gate voltage for the memory device. A comparison of the channel program performance distribution graph and the channel erase performance distribution graph with respect to said baseline performance distribution graph is then performed. In so doing, an asymmetric distribution of the channel program performance distribution graph and the channel erase performance distribution graph with respect to the baseline performance distribution indicates tunnel oxide encroachment.
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