发明授权
US06864111B2 Column-row addressable electric microswitch arrays and sensor matrices employing them
失效
列行可寻址电动微动开关阵列和采用它们的传感器矩阵
- 专利标题: Column-row addressable electric microswitch arrays and sensor matrices employing them
- 专利标题(中): 列行可寻址电动微动开关阵列和采用它们的传感器矩阵
-
申请号: US10628009申请日: 2003-07-25
-
公开(公告)号: US06864111B2公开(公告)日: 2005-03-08
- 发明人: Gang Yu , Yong Cao
- 申请人: Gang Yu , Yong Cao
- 申请人地址: US DE Wilmington
- 专利权人: E. I. du Pont de Nemours and Company
- 当前专利权人: E. I. du Pont de Nemours and Company
- 当前专利权人地址: US DE Wilmington
- 主分类号: G01J1/02
- IPC分类号: G01J1/02 ; H01L21/00 ; H01L27/144 ; H01L27/146 ; H01L27/24 ; H01L27/28 ; H01L27/30 ; H01L29/47 ; H01L29/872 ; H01L31/09 ; H01L35/24 ; H01L45/00 ; H01L47/00 ; H01L49/02 ; H01L51/00 ; H01L51/05 ; H01L51/30 ; H01L51/42
摘要:
The present invention relates generally to fabricating two-terminal electric microswitches comprising thin semiconductor films and using these microswitches to construct column-row (x-y) addressable microswitch matrices. These microswitches are two terminal devices through which electric current and electric potential (or their derivatives or integrals) can be switched on and off by the magnitude or the polarity of the external bias. The microswitches are made from semiconducting thin films in a electrode/semiconductor/electrode, thin film configuration. Column-row addressable electric microswitch matrices can be made in large areas, with high pixel density. Such matrices can be integrated with a sensor layer with electronic properties which vary in response to external physical conditions (such as photon radiation, temperature, pressure, magnetic field and so on), thereby forming a variety of detector matrices.
公开/授权文献
信息查询