发明授权
- 专利标题: Clamshell and small volume chamber with fixed substrate support
- 专利标题(中): 蛤壳式和小容积室具有固定衬底支撑
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申请号: US10302774申请日: 2002-11-21
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公开(公告)号: US06866746B2公开(公告)日: 2005-03-15
- 发明人: Lawrence C. Lei , Alfred W. Mak , Gwo-Chuan Tzu , Avi Tepman , Ming Xi , Walter Benjamin Glenn
- 申请人: Lawrence C. Lei , Alfred W. Mak , Gwo-Chuan Tzu , Avi Tepman , Ming Xi , Walter Benjamin Glenn
- 申请人地址: US CA Santa Clara
- 专利权人: Applied Materials, Inc.
- 当前专利权人: Applied Materials, Inc.
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Moser Patterson & Sheridan
- 主分类号: C23C16/44
- IPC分类号: C23C16/44 ; C23C16/455 ; H01L21/00 ; C23C16/00 ; C23F1/00 ; H01L21/306
摘要:
Embodiments of the present invention generally relate to a clamshell and small volume chamber with a fixed substrate support. One embodiment of a processing chamber includes a fixed substrate support having a substrate receiving surface, a pumping ring disposed around a perimeter of the substrate receiving surface, and a gas distribution assembly disposed over the fixed substrate support. The pumping ring forms at least a portion of a pumping channel and has one or more apertures formed therethrough. The chamber may further include a gas-flow diffuser disposed radially inward of the apertures of the pumping ring. Another embodiment of a processing chamber includes a first assembly comprising a fixed substrate support and a second assembly comprising a gas distribution assembly. The first assembly includes a first assembly body that is shaped and sized so that at least a portion of the first assembly body is below the substrate receiving surface of the substrate support. A hinge assembly couples the first assembly and the second assembly. The first assembly and the second assembly can be selectively positioned between an open position and a closed position.
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