Invention Grant
- Patent Title: Method for rapid activation or preconditioning of porous gas purification substrates
- Patent Title (中): 快速激活或预处理多孔气体净化基板的方法
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Application No.: US10692019Application Date: 2003-10-23
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Publication No.: US06869463B2Publication Date: 2005-03-22
- Inventor: Jeffrey J. Spiegelman , Daniel Alvarez, Jr. , Joshua T. Cook
- Applicant: Jeffrey J. Spiegelman , Daniel Alvarez, Jr. , Joshua T. Cook
- Applicant Address: US MA Billerica
- Assignee: Mykrolis Corporation
- Current Assignee: Mykrolis Corporation
- Current Assignee Address: US MA Billerica
- Agency: Hamilton, Brook, Smith & Reynolds, P.C.
- Main IPC: B01D53/04
- IPC: B01D53/04 ; B01J20/34

Abstract:
A method is described for rapid and economical activation and/or preconditioning of gas purification substrates by providing forced convection of the preconditioning or activating gas through the pores of the substrate. The gas is pumped into the substrate-containing vessel and raised to an elevated pressure, which is maintained for a short predetermined time, followed by venting of contents of the vessel. The vessel is again pressurized with the purging gas to an elevated level, and the elevated pressure is maintained for a short predetermined time, followed by venting of the vessel. This cycle is repeated as often as needed or desired. Activation and/or preconditioning can be accomplished in a much shorter time and with much less gas usage compared to diffusion preconditioning and activation processes. This process is particularly suited for preconditioning and activation of gas purifier substrates for decontamination of gases down to ≦1 ppm contaminants.
Public/Granted literature
- US20040159234A1 Method for rapid activation or preconditioning of porous gas purification substrates Public/Granted day:2004-08-19
Information query
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