发明授权
- 专利标题： Sensor design and process
- 专利标题（中）： 传感器设计和工艺
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申请号： US09936640申请日： 2000-03-16
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公开(公告)号： US06871544B1公开(公告)日： 2005-03-29
- 发明人: Arjun Selvakumar , Howard D. Goldberg , Duli Yu , Matthew Ip , Martin A. Schmidt , James L. Marsh , Bing-Fai Fung , Philip Simon
- 申请人： Arjun Selvakumar , Howard D. Goldberg , Duli Yu , Matthew Ip , Martin A. Schmidt , James L. Marsh , Bing-Fai Fung , Philip Simon
- 申请人地址： US TX Stafford
- 专利权人： Input/Output, Inc.
- 当前专利权人： Input/Output, Inc.
- 当前专利权人地址： US TX Stafford
- 代理机构： Madan, Mossman & Sriram, P.C.
- 国际申请： PCTUS00/40039 WO 20000316
- 国际公布： WO0055638 WO 20000921
- 主分类号： G01D11/24
- IPC分类号： G01D11/24 ; G01P1/02 ; G01P15/02 ; G01P15/08 ; G01P15/125 ; G01V1/047 ; G01V1/053 ; G01V1/104 ; G01V1/18 ; G01V1/38 ; H01L21/465 ; G01P15/00
摘要：
An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press frame recess (420) for isolating bonding pressures to specified regions of the accelerometer (305). The accelerometer (305) is vacuum-sealed and includes a balanced metal pattern (730) to prevent degradation of the performance of the accelerometer (305). A dicing process is performed on the accelerometer (305) to isolate the electrical leads of the accelerometer (305). The accelerometer (305) further includes overshock protection bumpers (720) and patterned metal electrodes to reduce stiction during the operation of the accelerometer (305).
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