Invention Grant
- Patent Title: System for depositing a film
- Patent Title (中): 沉积薄膜的系统
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Application No.: US10233272Application Date: 2002-08-30
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Publication No.: US06872285B2Publication Date: 2005-03-29
- Inventor: Shinji Furukawa , Miho Sakai
- Applicant: Shinji Furukawa , Miho Sakai
- Applicant Address: JP Tokyo
- Assignee: Anelva Corporation
- Current Assignee: Anelva Corporation
- Current Assignee Address: JP Tokyo
- Agency: Hogan & Hartson, LLP
- Priority: JP2001-262108 20010830
- Main IPC: C23C14/34
- IPC: C23C14/34 ; C23C14/04 ; C23C14/22 ; C23C14/35 ; G11B5/851 ; H01J37/34

Abstract:
This application discloses a system for depositing a magnetic film for a magnetic recording layer or depositing an underlying film prior to depositing a magnetic film as a recording layer. The system comprises; a chamber in which the film is deposited onto a substrate by sputtering, a target that is provided in the chamber and made of material of the film to be deposited, a sputter power source for applying voltage to the target for the sputtering, and a direction control member for controlling sputter-particles released from the target during the sputtering. The direction control member is provided between the substrate and the target. The direction control member provides a passage for the sputter-particles. The direction control member lets the sputter-particles selectively pass through, thereby allowing magnetic anisotropy to the magnetic film. The passage is not close but open in its cross section.
Public/Granted literature
- US20030062260A1 System for depositing a film Public/Granted day:2003-04-03
Information query
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