Semiconductor chip design and analysis is enhanced by using a dummy structure for analyzing a test structure in a test chip. According to an example embodiment of the present invention, a dummy structure is formed having structure that is about identical to that of test structure in a test chip. The parasitic capacitance of the dummy structure is determined and used to analyze the test structure. In this manner, the parasitic capacitance associated with the test structure can be accounted for, enhancing the ability to design, test, and debug semiconductor chips.