发明授权
- 专利标题: Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch
- 专利标题(中): 具有可变电容的电容器的装置,特别是高频微动开关
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申请号: US10220683申请日: 2001-12-13
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公开(公告)号: US06882255B2公开(公告)日: 2005-04-19
- 发明人: Roland Mueller-Fiedler , Thomas Walter , Markus Ulm
- 申请人: Roland Mueller-Fiedler , Thomas Walter , Markus Ulm
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon
- 优先权: DE10100296 20010104
- 国际申请: PCTDE01/04693 WO 20011213
- 国际公布: WO0205452 WO 20020711
- 主分类号: H01H59/00
- IPC分类号: H01H59/00 ; H01P1/12 ; H01P3/02 ; H01P1/10
摘要:
A capacitor with alterable capacitance for changing the impedance of a section of a coplanar waveguide, which may be used in particular as a high-frequency microswitch, is provided. A ground lead and a signal lead interrupted by an electroconductive connection which is self-supporting at least in some areas are provided, the capacitor including the electroconductive connection and an additional electroconductive connection connected to the ground lead. A structure connected to the electroconductive connection is provided, which is designed in such a manner that it reduces mechanical stresses which occurs in the electroconductive connection. An exemplary embodiment of the device provides for the electroconductive connection to be made of a material having coefficients of thermal expansion similar to that of silicon and a high modulus of elasticity compared to metals, in particular of molybdenum, tantalum or tungsten. The two exemplary embodiments may be combined.
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