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公开(公告)号：US06686810B2
公开(公告)日：2004-02-03
申请号：US10089618
申请日：2002-07-17
IPC分类号： H01P504
CPC分类号： H01P1/127 , H01H59/0009
摘要： A device having a capacitor for changing the impedance of a section of a coplanar waveguide is provided, the capacitance of the capacitor being changeable, the signal line of the section of the waveguide being interrupted for a predefined length, a first connection connecting the ground lines of the waveguide, and the second connection connecting both parts of the interrupted signal line.
摘要翻译： 提供一种具有用于改变共面波导的一部分的阻抗的电容器的装置，电容器的电容是可变的，波导部分的信号线被中断预定长度，连接接地线的第一连接 以及连接中断的信号线的两个部分的第二连接。
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2.发明授权Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch 失效具有可变电容的电容器的装置，特别是高频微动开关公开(公告)号：US06882255B2
公开(公告)日：2005-04-19
申请号：US10220683
申请日：2001-12-13
CPC分类号： H01P1/127 , H01H59/0009
摘要： A capacitor with alterable capacitance for changing the impedance of a section of a coplanar waveguide, which may be used in particular as a high-frequency microswitch, is provided. A ground lead and a signal lead interrupted by an electroconductive connection which is self-supporting at least in some areas are provided, the capacitor including the electroconductive connection and an additional electroconductive connection connected to the ground lead. A structure connected to the electroconductive connection is provided, which is designed in such a manner that it reduces mechanical stresses which occurs in the electroconductive connection. An exemplary embodiment of the device provides for the electroconductive connection to be made of a material having coefficients of thermal expansion similar to that of silicon and a high modulus of elasticity compared to metals, in particular of molybdenum, tantalum or tungsten. The two exemplary embodiments may be combined.
摘要翻译： 提供了具有可变电容的电容器，用于改变可以特别用作高频微型开关的共面波导的一部分的阻抗。 至少在一些区域中，由导电连接中断的接地引线和信号引线被提供，该电容器包括导电连接和连接到接地引线的附加导电连接。 提供连接到导电连接的结构，其被设计成使得其减小在导电连接中发生的机械应力。 该装置的一个示例性实施例提供了导电连接，该导电连接由具有类似于硅的热膨胀系数的材料制成，并且与金属特别是钼，钽或钨相比具有高的弹性模量。 两个示例性实施例可以组合。
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公开(公告)号：US06762923B2
公开(公告)日：2004-07-13
申请号：US10149943
申请日：2002-08-27
IPC分类号： H01G500
CPC分类号： H01P1/2013 , H01H59/0009 , H01P1/127 , H01P3/003
摘要： A device including a capacitor system for varying the impedance of a section of a coplanar waveguide. The capacitance of the capacitor system is variable. The capacitor system includes a first electrically conductive connection, a second electrically conductive connection, and a third electrically conductive connection at least partially. The signal line of the section of the waveguide is interrupted over a predetermined length, the first connection connecting the ground lines of the waveguide, the second connection connecting the ground lines of the waveguide, and the third connection connecting the two parts of the interrupted signal line.
摘要翻译： 一种包括用于改变共面波导的一部分的阻抗的电容器系统的装置。 电容器系统的电容是可变的。 电容器系统至少部分地包括第一导电连接，第二导电连接和第三导电连接。 波导部分的信号线被中断预定长度，连接波导的接地线的第一连接，连接波导的接地线的第二连接和连接中断信号的两部分的第三连接 线。
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4.发明申请Component for Impedance Change in a Coplanar Waveguide and Method for Producing a Component 失效共面波导中的阻抗变化的组件和用于制造组件的方法公开(公告)号：US20070229198A1
公开(公告)日：2007-10-04
申请号：US10572220
申请日：2004-07-24
CPC分类号： H01H59/0009 , Y10T29/49105
摘要： A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.
摘要翻译： 提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件， 并且是电绝缘的，使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。 此外，还提供了这种组分的制造方法。
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5.发明授权Component for impedance change in a coplanar waveguide and method for producing a component 失效共面波导中的阻抗变化的分量和用于制造组件的方法公开(公告)号：US07535325B2
公开(公告)日：2009-05-19
申请号：US10572220
申请日：2004-07-24
CPC分类号： H01H59/0009 , Y10T29/49105
摘要： A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.
摘要翻译： 提供了一种用于在共面波导中的阻抗变化的部件，其包括两个接地导体和位于接地导体之间的信号线，以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件， 并且是电绝缘的，使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容，但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构，其中以相反的方式，接地导体和连接元件之间的相应电容器具有可变电容，但是连接元件和信号线之间的电容器具有不变的电容。 此外，还提供了这种组分的制造方法。
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6.发明授权Capacitive finger coupling element on a silicon support for coupling a strip line structure 失效用于耦合带状线结构的硅支撑上的电容指状结合元件公开(公告)号：US06876268B2
公开(公告)日：2005-04-05
申请号：US10381236
申请日：2002-05-07
申请人： Thomas Walter , Markus Ulm , Stefan Keith , Dirk Steinbuch , Mathias Reimann
发明人： Thomas Walter , Markus Ulm , Stefan Keith , Dirk Steinbuch , Mathias Reimann
CPC分类号： H01P1/203
摘要： A coupling element for an HF strip line structure on an HF substrate, implemented in thin-layer technology as a finger coupler structure on a silicon support is described. The bonding to the strip line tracks of the HF strip line structure is effected via metallizations, in particular in the form of spacers.
摘要翻译： 描述了在作为硅载体上的手指耦合器结构的薄层技术中实现的HF衬底上的HF带状线结构的耦合元件。 通过金属化，特别是以间隔物的形式，实现了与带状线路轨道的接合。
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公开(公告)号：US20090278214A1
公开(公告)日：2009-11-12
申请号：US12506219
申请日：2009-07-20
申请人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
发明人： Markus Ulm , Brian Stark , Matthias Metz , Tino Fuchs , Franz Laermer , Silvia Kronmueller
IPC分类号： H01L29/84
CPC分类号： B81C1/0096 , B81B3/0005
摘要： An encapsulated MEMS process including a high-temperature anti-stiction coating that is stable under processing steps at temperatures over 450 C is described. The coating is applied after device release but before sealing vents in the encapsulation layer. Alternatively, an anti-stiction coating may be applied to released devices directly before encapsulation.
摘要翻译： 描述了一种封装的MEMS工艺，其包括在高于450℃的温度下在加工步骤下稳定的高温抗静电涂层。 涂层在器件释放后，但在封装层封口之前应用。 或者，可以在封装之前将抗静电涂层直接施加到释放的装置。
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公开(公告)号：US07414351B2
公开(公告)日：2008-08-19
申请号：US11541966
申请日：2006-10-02
申请人： Markus Ulm , Brian Stark , Matthias Metz
发明人： Markus Ulm , Brian Stark , Matthias Metz
IPC分类号： H01L31/00
CPC分类号： B60C23/0411 , H01L41/1136 , H01L41/331 , H01L41/43 , H02N2/186 , H02N2/22 , Y10T29/42 , Y10T29/435 , Y10T29/49007 , Y10T29/49172 , Y10T29/49176 , Y10T29/49224
摘要： Embodiments of making an energy harvesting device are described. In one embodiment, a case and integrated piezoelectric cantilever to harvest vibration energy from an environment being sensed is produced via a print forming method injection molding method. The cantilever device consists of a piezoelectric material member, and a proof mass of high density material coupled to the piezoelectric member. The print forming method is used to build up the base and walls of the device as well as the neutral layers of the piezoelectric member. Metal layers are printed to form the electrode layers of the piezoelectric member and the electrical contact portions of the device. Passive components can also be formed as part of the layers of the device. The entire assembly can be encapsulated in plastic.
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9.发明申请公开(公告)号：US20060246631A1
公开(公告)日：2006-11-02
申请号：US11115828
申请日：2005-04-27
申请人： Markus Lutz , Aaron Partridge , Wilhelm Frey , Markus Ulm , Matthias Metz , Brian Stark , Gary Yama
发明人： Markus Lutz , Aaron Partridge , Wilhelm Frey , Markus Ulm , Matthias Metz , Brian Stark , Gary Yama
IPC分类号： H01L21/44
CPC分类号： B81C1/0096 , B81B3/0005 , B81C2201/112 , B82Y30/00 , H01L2224/13 , H01L2924/1461 , H01L2924/00
摘要： A mechanical structure is disposed in a chamber, at least a portion of which is defined by the encapsulation structure. A first method provides a channel cap having at least one preform portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. A second method provides a channel cap having at least one portion disposed over or in at least a portion of an anti-stiction channel to seal the anti-stiction channel, at least in part. The at least one portion is fabricated apart from the electromechanical device and thereafter affixed to the electromechanical device. A third method provides a channel cap having at least one portion disposed over or in at least a portion of the anti-stiction channel to seal an anti-stiction channel, at least in part. The at least one portion may comprise a wire ball, a stud, metal foil or a solder preform. A device includes a substrate, an encapsulation structure and a mechanical structure. An anti-stiction layer is disposed on at least a portion of the mechanical structure. An anti-stiction channel is formed in at least one of the substrate and the encapsulation structure. A cap has at least one preform portion disposed over or in at least a portion of the anti-stiction channel to seal the anti-stiction channel, at least in part.
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10.发明申请Tri-axis accelerometer having a single proof mass and fully differential output signals 有权三轴加速度计具有单个检测质量和全差分输出信号公开(公告)号：US20080053228A1
公开(公告)日：2008-03-06
申请号：US11513669
申请日：2006-08-30
申请人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
发明人： Zhiyu Pan , Christoph Lang , Gary Yama , Matthias Metz , Markus Ulm
IPC分类号： G01P15/00
CPC分类号： G01P15/09 , G01P15/0802 , G01P15/123 , G01P15/18 , G01P2015/084 , Y10T29/42
摘要： A tri-axis accelerometer includes a proof mass, at least four anchor points arranged in at least two opposite pairs, a first pair of anchor points being arranged opposite one another along a first axis, a second pair of anchor points being arranged opposite one another along a second axis, the first axis and the second axis being perpendicular to one another, and at least four spring units to connect the proof mass to the at least four anchor points, the spring units each including a pair of identical springs, each spring including a sensing unit.
摘要翻译： 三轴加速度计包括证明质量块，至少四个锚点至少布置在两对相对中，第一对锚定点沿着第一轴线彼此相对布置，第二对固定点彼此相对布置 沿着第二轴线，所述第一轴线和所述第二轴线彼此垂直;以及至少四个弹簧单元，用于将所述证明物质连接到所述至少四个锚定点，所述弹簧单元各自包括一对相同的弹簧，每个弹簧 包括感测单元。
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