Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch
    1.
    发明授权
    Device having a capacitor with alterable capacitance, in particular a high-frequency microswitch 失效
    具有可变电容的电容器的装置,特别是高频微动开关

    公开(公告)号:US06882255B2

    公开(公告)日:2005-04-19

    申请号:US10220683

    申请日:2001-12-13

    CPC分类号: H01P1/127 H01H59/0009

    摘要: A capacitor with alterable capacitance for changing the impedance of a section of a coplanar waveguide, which may be used in particular as a high-frequency microswitch, is provided. A ground lead and a signal lead interrupted by an electroconductive connection which is self-supporting at least in some areas are provided, the capacitor including the electroconductive connection and an additional electroconductive connection connected to the ground lead. A structure connected to the electroconductive connection is provided, which is designed in such a manner that it reduces mechanical stresses which occurs in the electroconductive connection. An exemplary embodiment of the device provides for the electroconductive connection to be made of a material having coefficients of thermal expansion similar to that of silicon and a high modulus of elasticity compared to metals, in particular of molybdenum, tantalum or tungsten. The two exemplary embodiments may be combined.

    摘要翻译: 提供了具有可变电容的电容器,用于改变可以特别用作高频微型开关的共面波导的一部分的阻抗。 至少在一些区域中,由导电连接中断的接地引线和信号引线被提供,该电容器包括导电连接和连接到接地引线的附加导电连接。 提供连接到导电连接的结构,其被设计成使得其减小在导电连接中发生的机械应力。 该装置的一个示例性实施例提供了导电连接,该导电连接由具有类似于硅的热膨胀系数的材料制成,并且与金属特别是钼,钽或钨相比具有高的弹性模量。 两个示例性实施例可以组合。

    Coplanar switch
    2.
    发明授权
    Coplanar switch 失效
    共面开关

    公开(公告)号:US06762923B2

    公开(公告)日:2004-07-13

    申请号:US10149943

    申请日:2002-08-27

    IPC分类号: H01G500

    摘要: A device including a capacitor system for varying the impedance of a section of a coplanar waveguide. The capacitance of the capacitor system is variable. The capacitor system includes a first electrically conductive connection, a second electrically conductive connection, and a third electrically conductive connection at least partially. The signal line of the section of the waveguide is interrupted over a predetermined length, the first connection connecting the ground lines of the waveguide, the second connection connecting the ground lines of the waveguide, and the third connection connecting the two parts of the interrupted signal line.

    摘要翻译: 一种包括用于改变共面波导的一部分的阻抗的电容器系统的装置。 电容器系统的电容是可变的。 电容器系统至少部分地包括第一导电连接,第二导电连接和第三导电连接。 波导部分的信号线被中断预定长度,连接波导的接地线的第一连接,连接波导的接地线的第二连接和连接中断信号的两部分的第三连接 线。

    Coplanar waveguide switch
    3.
    发明授权
    Coplanar waveguide switch 失效
    共面波导开关

    公开(公告)号:US06686810B2

    公开(公告)日:2004-02-03

    申请号:US10089618

    申请日:2002-07-17

    IPC分类号: H01P504

    CPC分类号: H01P1/127 H01H59/0009

    摘要: A device having a capacitor for changing the impedance of a section of a coplanar waveguide is provided, the capacitance of the capacitor being changeable, the signal line of the section of the waveguide being interrupted for a predefined length, a first connection connecting the ground lines of the waveguide, and the second connection connecting both parts of the interrupted signal line.

    摘要翻译: 提供一种具有用于改变共面波导的一部分的阻抗的电容器的装置,电容器的电容是可变的,波导部分的信号线被中断预定长度,连接接地线的第一连接 以及连接中断的信号线的两个部分的第二连接。

    Component for Impedance Change in a Coplanar Waveguide and Method for Producing a Component
    4.
    发明申请
    Component for Impedance Change in a Coplanar Waveguide and Method for Producing a Component 失效
    共面波导中的阻抗变化的组件和用于制造组件的方法

    公开(公告)号:US20070229198A1

    公开(公告)日:2007-10-04

    申请号:US10572220

    申请日:2004-07-24

    IPC分类号: H01P1/10 H01H65/00

    CPC分类号: H01H59/0009 Y10T29/49105

    摘要: A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.

    摘要翻译: 提供了一种用于在共面波导中的阻抗变化的部件,其包括两个接地导体和位于接地导体之间的信号线,以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件, 并且是电绝缘的,使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容,但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构,其中以相反的方式,接地导体和连接元件之间的相应电容器具有可变电容,但是连接元件和信号线之间的电容器具有不变的电容。 此外,还提供了这种组分的制造方法。

    Component for impedance change in a coplanar waveguide and method for producing a component
    5.
    发明授权
    Component for impedance change in a coplanar waveguide and method for producing a component 失效
    共面波导中的阻抗变化的分量和用于制造组件的方法

    公开(公告)号:US07535325B2

    公开(公告)日:2009-05-19

    申请号:US10572220

    申请日:2004-07-24

    IPC分类号: H01P1/10 H01H59/00

    CPC分类号: H01H59/0009 Y10T29/49105

    摘要: A component is provided for an impedance change in a coplanar waveguide which includes two grounding conductors and a signal line lying between the grounding conductors, as well as a conducting connecting element, which has a covering surface for the two grounding conductors and the signal line, and is electrically insulated, so that in each case a capacitor is formed. The connecting element and the lines are situated and arranged so that the respective capacitor between the grounding conductors and the connecting element has an invariable capacitance, but the capacitor between the connecting element and the signal line has a variable capacitance. A structure is also provided in which in an exactly opposite way, the respective capacitor between the grounding conductors and the connecting element has a variable capacitance, but the capacitor between the connecting element and the signal line has an invariable capacitance. Furthermore, a method for producing such a component is also provided.

    摘要翻译: 提供了一种用于在共面波导中的阻抗变化的部件,其包括两个接地导体和位于接地导体之间的信号线,以及具有用于两个接地导体和信号线的覆盖表面的导电连接元件, 并且是电绝缘的,使得在每种情况下都形成电容器。 连接元件和线路被布置成使得接地导体和连接元件之间的相应电容器具有不变的电容,但是连接元件和信号线之间的电容器具有可变电容。 还提供了一种结构,其中以相反的方式,接地导体和连接元件之间的相应电容器具有可变电容,但是连接元件和信号线之间的电容器具有不变的电容。 此外,还提供了这种组分的制造方法。

    Method and system for detecting a spatial movement state of moving objects
    6.
    发明授权
    Method and system for detecting a spatial movement state of moving objects 失效
    用于检测移动物体的空间运动状态的方法和系统

    公开(公告)号:US06925413B2

    公开(公告)日:2005-08-02

    申请号:US10320278

    申请日:2002-12-16

    摘要: A method and a system for detecting the spatial movement state of moving objects, e.g., vehicles. Due to a, for example, non-cartesian arrangement of four rotational rate sensors and/or acceleration sensors, it is also possible to obtain a redundant signal in addition to the desired useful signal indicating the spatial movement state, e.g., the rotational movement and/or acceleration in space; if this redundant signal is large enough in comparison with the rotational rate actually applied, it may be used for detection of the size of the error and the defective sensor. The four sensors are mounted, for example, on a sensor platform forming a three-sided truncated pyramid so that all possible three-way combinations of sensors are mutually linearly independent. The accuracy about the vertical axis is defined by the angle of inclination of the side faces of the truncated pyramid.

    摘要翻译: 一种用于检测运动物体(例如车辆)的空间运动状态的方法和系统。 例如,由于例如四个转速传感器和/或加速度传感器的非笛卡尔布置,除了表示空间运动状态的期望的有用信号之外,还可以获得冗余信号,例如旋转运动和 /或空间加速; 如果该冗余信号与实际施加的旋转速度相比足够大,则其可用于检测误差的尺寸和有缺陷的传感器。 四个传感器例如安装在形成三边截棱锥的传感器平台上,使得传感器的所有可能的三向组合相互线性独立。 垂直轴的精度由截顶棱锥的侧面的倾斜角定义。

    Thermooptical modulator
    7.
    发明授权
    Thermooptical modulator 失效
    光电调制器

    公开(公告)号:US06295158B1

    公开(公告)日:2001-09-25

    申请号:US09556553

    申请日:2000-04-24

    IPC分类号: G02F101

    摘要: The thermooptic modulator includes a wave guide (1) having a switching section (4), a refracting section (5) bordering the switching section (4) and extending transversely to a signal propagation direction (14) in the wave guide and a first heating element (8) extending on the refracting section (5) along a boundary (6) between the wave guide (1) and the refracting section (5). In order to improve signal suppression when the modulator is switched to an impermable state, a second heating element (9) is provided extending on the wave guide (1) along the boundary (6).

    摘要翻译: 热光调制器包括具有开关部分(4)的波导(1),与开关部分(4)接壤并横向于波导中信号传播方向(14)延伸的折射部分(5),第一加热 元件(8)沿着波导(1)和折射部(5)之间的边界(6)在折射部分(5)上延伸。 为了在调制器切换到不可操作状态时改善信号抑制,提供沿着边界(6)在波导(1)上延伸的第二加热元件(9)。

    Optical switching device
    8.
    发明授权
    Optical switching device 失效
    光开关器件

    公开(公告)号:US5841912A

    公开(公告)日:1998-11-24

    申请号:US804940

    申请日:1997-02-24

    IPC分类号: G02B6/12 G02B6/125 G02F1/335

    摘要: The optical switching device includes an optical layer (5) provided with at least one optical waveguide (11) having an entrance (13) and an outlet (15) and at least one other optical waveguide (21) provided in the optical layer (5) with another outlet (23); a piezoelectric layer (7) arranged on the optical layer (5); electrodes (9) for producing an acoustic wave provided on the piezoelectric layer (7); and a device for performing a Bragg light deflection with optical frequency shift by one of activating and deactivating the electrodes to optically couple the entrance (13) of the at least one optical waveguide (11) with one or the other of the outlets (15, 23). The invention also relates to an optical by-pass circuit which is a combination of two optical switching devices.

    摘要翻译: 该光学开关装置包括设置有至少一个具有入口(13)和出口(15)的光波导(11)的光学层(5)和设置在光学层(5)中的至少一个其它光波导 )与另一个出口(23) 布置在所述光学层(5)上的压电层(7); 用于产生设置在压电层(7)上的声波的电极(9); 以及用于通过激活和去激活电极来执行具有光学频移的布拉格光偏转的装置,以将至少一个光波导(11)的入口(13)与一个或另一个出口(15, 23)。 本发明还涉及作为两个光学开关装置的组合的光学旁路电路。

    Optical sensor
    9.
    发明授权
    Optical sensor 失效
    光学传感器

    公开(公告)号:US06668104B1

    公开(公告)日:2003-12-23

    申请号:US09554347

    申请日:2000-07-24

    IPC分类号: G02B600

    摘要: An optical sensor for detecting wetting of a surface (11), In particular of a vehicle window, has at least one transmitter (13) and at least one receiver (15) for electromagnetic waves, the surface being located in a sensor region (16) between the at least one transmitter (13) and the at least one receiver (15). The development of wetting on the sensor region (16) of the surface (11) causes a signal change. The optical sensor has a light-carrying element (18), in which the electromagnetic waves are guided bidirectionally into the sensor region (16) and out of the sensor region (16), and a retroreflector (10) is disposed in the sensor region (16) in such a way that it returns the electromagnetic waves, reflected before the surface (11), back to the surface (11) and from there to the light-carrying element (18).

    摘要翻译: 用于检测表面(11)(特别是车辆窗口)的润湿的光学传感器具有用于电磁波的至少一个发射器(13)和至少一个接收器(15),所述接收器(15)位于传感器区域(16 )在所述至少一个发射器(13)和所述至少一个接收器(15)之间。 在表面(11)的传感器区域(16)上的润湿的发展导致信号改变。 光传感器具有光电传输元件(18),其中电磁波被双向引导到传感器区域(16)中并且离开传感器区域(16),并且后向反射器(10)设置在传感器区域 (16),使得其将在表面(11)之前反射的电磁波返回到表面(11)并从那里返回到轻载体(18)。

    Method for producing three-dimensional structures by means of an etching process
    10.
    发明授权
    Method for producing three-dimensional structures by means of an etching process 失效
    通过蚀刻工艺制备三维结构的方法

    公开(公告)号:US06663784B1

    公开(公告)日:2003-12-16

    申请号:US09890080

    申请日:2002-02-04

    IPC分类号: H01L2100

    CPC分类号: B81C1/00412

    摘要: A method is proposed for producing three-dimensional structures, especially microlenses, in a substrate using an etching process, at least one original shape having a known original surface shape being present initially on the substrate in a plurality of places. The etching process has at least one first etching removal rate a1 and a second etching removal rate a2 which are material-dependent, and of which at least one is changeable as a function of time. The original shape is converted to a target shape by the etching process, the original surface shape of the original shape and the target surface shape of the target shape to be reached being known before the beginning of the etching process. In order to achieve the target surface shape, at least one of the etching rates a2 or a1 is set by a change of at least one etching parameter calculated before the beginning of the etching process as a function of the etching time.

    摘要翻译: 提出了一种使用蚀刻工艺在衬底中制造三维结构,特别是微透镜的方法,至少一种具有已知原始表面形状的原始形状最初存在于多个位置的衬底上。 蚀刻工艺具有与材料有关的至少一个第一蚀刻去除速率a1和第二蚀刻去除速率a2,其中至少一个可随时间变化。 原始形状通过蚀刻处理转换为目标形状,原始形状的原始表面形状和待形成的目标形状的目标表面形状在蚀刻工艺开始之前是已知的。 为了实现目标表面形状,蚀刻速度a2或a1中的至少一个通过蚀刻工艺开始之前计算的至少一个蚀刻参数的变化来设定,作为蚀刻时间的函数。