- 专利标题: Fabrication of self-aligned bipolar transistor
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申请号: US10290635申请日: 2002-11-12
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公开(公告)号: US06884689B2公开(公告)日: 2005-04-26
- 发明人: Shu-Ya Chuang , Jing-Horng Gau , Anchor Chen
- 申请人: Shu-Ya Chuang , Jing-Horng Gau , Anchor Chen
- 申请人地址: TW Hsinchu
- 专利权人: United Microelectronics Corp.
- 当前专利权人: United Microelectronics Corp.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Chyun IP Office
- 优先权: TW90121827A 20010904
- 主分类号: H01L21/331
- IPC分类号: H01L21/331
摘要:
A method for fabricating a self-aligned bipolar transistor, wherein a substrate having an epitaxial layer formed thereon as a base is provided. After this, a first dielectric layer, a second dielectric layer are sequentially formed on the epitaxial layer, followed by forming an opening in the second dielectric layer. A conductive spacer is formed on the sidewall of the opening. Using the second dielectric layer and the conductive spacer as a mask, a first dielectric layer in the opening is removed. A conductive layer is then formed in the opening as an emitter, followed by completely removing the second dielectric layer. A doping is conducted on the emitter. Using the emitter and the conductive spacer as a mask, a part of the first dielectric layer is removed. Further using the emitter and the conductive spacer as a mask, another doping is conducted to form a part of the epitaxial layer as a base contact region.
公开/授权文献
- US20030096486A1 Fabrication of self-aligned bipolar transistor 公开/授权日:2003-05-22
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