发明授权
- 专利标题： Electron beam array write head system and method
- 专利标题（中）： 电子束阵列写头系统及方法
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申请号： US10348658申请日： 2003-01-21
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公开(公告)号： US06891169B2公开(公告)日： 2005-05-10
- 发明人: Scott Josef Bukofsky , Bomy Able Chen , Sara Jennifer Eames , Qiang Wu
- 申请人： Scott Josef Bukofsky , Bomy Able Chen , Sara Jennifer Eames , Qiang Wu
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Jay H. Anderson
- 主分类号： H01J37/073
- IPC分类号： H01J37/073 ; H01J1/304 ; H01J37/305 ; H01J37/317 ; H01L21/027 ; H01J37/30 ; H01J29/70 ; H01J29/72
摘要：
An e-beam system generates a set of massively parallel beams of order of magnitude 1,000 by employing a flash eprom to store calibration data and to receive on/off signals directed through the address system of the memory array, the individual electron sources being mounted above the memory array in a geometric array that tracks the structure of the memory array.
公开/授权文献
- US20040140437A1 Electron beam array write head system and method 公开/授权日：2004-07-22
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