Invention Grant
- Patent Title: Under-bump-metallurgy layer for improving adhesion
- Patent Title (中): 不足焊点 - 冶金层,用于改善附着力
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Application No.: US10604794Application Date: 2003-08-18
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Publication No.: US06891274B2Publication Date: 2005-05-10
- Inventor: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Jeng-Da Wu , Chih-Huang Chang , Po-Jen Cheng
- Applicant: William Tze-You Chen , Ho-Ming Tong , Chun-Chi Lee , Su Tao , Jeng-Da Wu , Chih-Huang Chang , Po-Jen Cheng
- Applicant Address: TW Kaohsiung
- Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee: Advanced Semiconductor Engineering, Inc.
- Current Assignee Address: TW Kaohsiung
- Agency: Jianq Chyun IP Office
- Priority: TW91120546A 20020910
- Main IPC: H01L21/60
- IPC: H01L21/60 ; H01L23/485 ; H01L23/48 ; H01L23/52 ; H01L29/40

Abstract:
An under-bump-metallurgy layer is provided. The under-bump-metallurgy layer is formed over the contact pad of a chip and a welding lump is formed over the under-ball-metallurgy layer. The under-bump-metallurgy layer comprises an adhesion layer, a barrier layer and a wettable layer. The adhesion layer is directly formed over the contact pad. The barrier layer made from a material such as nickel-vanadium alloy is formed over the adhesion layer. The wettable layer made from a material such as copper is formed over the barrier layer. The wettable layer has an overall thickness that ranges from about 3 μm to about 8 μm.
Public/Granted literature
- US20040113273A1 UNDER-BUMP-METALLURGY LAYER FOR IMPROVING ADHESION Public/Granted day:2004-06-17
Information query
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