发明授权
US06893791B2 Photoresist composition and method of forming pattern using the same
有权
光刻胶组合物和使用其形成图案的方法
- 专利标题: Photoresist composition and method of forming pattern using the same
- 专利标题(中): 光刻胶组合物和使用其形成图案的方法
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申请号: US10259152申请日: 2002-09-27
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公开(公告)号: US06893791B2公开(公告)日: 2005-05-17
- 发明人: You-Kyoung Lee , Sung-Chul Kang , Jin-Ho Ju , Dong-Ki Lee , Seung-Uk Lee , Hoon Kang
- 申请人: You-Kyoung Lee , Sung-Chul Kang , Jin-Ho Ju , Dong-Ki Lee , Seung-Uk Lee , Hoon Kang
- 申请人地址: KR Kyungki-Do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Kyungki-Do
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR2002-625 20020105
- 主分类号: G03F7/004
- IPC分类号: G03F7/004 ; G02F1/13 ; G03F7/008 ; G03F7/022 ; G03F7/023 ; G03F7/40 ; G03F7/30
摘要:
Disclosed is a photoresist composition having a good sensitivity and residual layer characteristic and a method of forming a pattern using the same. The photoresist composition includes 5-30% by weight of a polymer resin, 2-10% by weight of a photosensitive compound, 0.1-10% by weight of a sensitivity enhancing agent, 0.1-10% by weight of a sensitivity restraining agent and 60-90% by weight of an organic solvent. A photoresist layer is formed by coating the photoresist composition on a substrate and then drying the coated photoresist composition. Then, thus obtained photoresist layer is exposed by using a mask having a predetermined pattern. Then, a photoresist pattern is formed by developing thus exposed photoresist layer. The photoresist pattern exhibits a uniform layer thickness and critical dimension.
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