发明授权
- 专利标题： Method of controlling carrier head with multiple chambers
- 专利标题（中）： 用多个腔室控制载具头的方法
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申请号： US10666003申请日： 2003-09-17
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公开(公告)号： US06896584B2公开(公告)日： 2005-05-24
- 发明人: Ilya Perlov , Eugene Gantvarg , Sen-Hou Ko
- 申请人： Ilya Perlov , Eugene Gantvarg , Sen-Hou Ko
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Fish & Richardson
- 主分类号： B24B37/27
- IPC分类号： B24B37/27 ; B24B37/04 ; B24B37/30 ; B24B37/32 ; B24B47/10 ; B24B47/12 ; B24B49/16 ; H01L21/304 ; B24B49/00
摘要：
A carrier head with a flexible member connected to a base to define a first chamber, a second chamber and a third chamber. A lower surface of the flexible member provides a substrate receiving surface with an inner portion associated with the first chamber, a substantially annular middle portion surrounding the inner portion and associated with the second chamber, and a substantially annular outer portion surrounding the middle portion and associated with the third chamber. The width of the outer portion may be significantly less than the width of the middle portion. The carrier head may also include a flange connected to a drive shaft and a gimbal pivotally connecting the flange to the base.