发明授权
US06903995B2 Test structure for the measurement of contact to gate distance in non-volatile memory devices and corresponding test method
失效
用于测量非易失性存储器件中接触栅极距离的测试结构和相应的测试方法
- 专利标题: Test structure for the measurement of contact to gate distance in non-volatile memory devices and corresponding test method
- 专利标题(中): 用于测量非易失性存储器件中接触栅极距离的测试结构和相应的测试方法
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申请号: US10449761申请日: 2003-05-30
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公开(公告)号: US06903995B2公开(公告)日: 2005-06-07
- 发明人: Emilio Camerlenghi , Paolo Cappelletti , Tecla Ghilardi , Mauro Sali , Giorgio Servalli
- 申请人: Emilio Camerlenghi , Paolo Cappelletti , Tecla Ghilardi , Mauro Sali , Giorgio Servalli
- 申请人地址: IT Agrate Brianza
- 专利权人: STMicroelectronics S.r.l.
- 当前专利权人: STMicroelectronics S.r.l.
- 当前专利权人地址: IT Agrate Brianza
- 代理机构: Allen, Dyer, Doppelt, Milbrath & Gilchrist, P.A.
- 代理商 Lisa K. Jorgenson
- 优先权: EP02425360 20020531
- 主分类号: G11C29/00
- IPC分类号: G11C29/00 ; G11C29/02 ; G11C29/50 ; G11C8/00
摘要:
An integrated non-volatile memory device may include a first matrix of memory cells organized into rows (or word lines) and columns (or bit lines), corresponding row and column decoding circuits, and read, modify and erase circuits for reading and modifying data stored in the memory cells. Furthermore, the memory device may also include a test structure including a second matrix of memory cells smaller than the first. The second memory matrix may include word line couplings each having a different contact to gate distance. That is, each coupling is aligned a different distance from its respective gate than adjacent couplings.
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