发明授权
US06905576B1 Method and system for producing silane 失效
生产硅烷的方法和系统

Method and system for producing silane
摘要:
This invention relates to a continuous process for the preparation of silane by catalytic disproportionation of trichlorosilane in a reactive/distillative reaction zone having a catalyst bed of catalytically active solid.
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