发明授权
- 专利标题: Methods of forming patterned compositions
- 专利标题(中): 形成图案化组合物的方法
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申请号: US10613193申请日: 2003-07-03
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公开(公告)号: US06905975B2公开(公告)日: 2005-06-14
- 发明人: Ulrich C. Boettiger , Scott L. Light
- 申请人: Ulrich C. Boettiger , Scott L. Light
- 申请人地址: US ID Boise
- 专利权人: Micron Technology, Inc.
- 当前专利权人: Micron Technology, Inc.
- 当前专利权人地址: US ID Boise
- 代理机构: Wells St. John P.S.
- 主分类号: C23F1/00
- IPC分类号: C23F1/00 ; G03F7/004 ; G03F7/20 ; G03F7/40 ; H01L21/302 ; H01L21/311 ; H01L21/76
摘要:
The invention includes methods by which the size and shape of photoresist-containing masking compositions can be selectively controlled after development of the photoresist. For instance, photoresist features can be formed over a substrate utilizing a photolithographic process. Subsequently, at least some of the photoresist features can be exposed to actinic radiation to cause release of a substance from the photoresist. A layer of material is formed over the photoresist features and over gaps between the features. The material has a solubility in a solvent which is reduced when the material interacts with the substance released from the photoresist. The solvent is utilized to remove portions of the material which are not sufficiently proximate to the photoresist to receive the substance, selectively relative to portions which are sufficiently proximate to the photoresist. The photoresist features can be exposed to the actinic radiation either before or after forming the layer of material.
公开/授权文献
- US20050000936A1 Methods of forming patterned compositions 公开/授权日:2005-01-06
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