Invention Grant
- Patent Title: Flash memory cell and fabrication thereof
- Patent Title (中): 闪存单元及其制造
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Application No.: US10250038Application Date: 2003-05-30
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Publication No.: US06906377B2Publication Date: 2005-06-14
- Inventor: Chih-Jung Ni , Chung-Ming Chu , Tu-Hao Yu , Kuo-Chen Wang , Wen-Shun Lo , Haochieh Liu
- Applicant: Chih-Jung Ni , Chung-Ming Chu , Tu-Hao Yu , Kuo-Chen Wang , Wen-Shun Lo , Haochieh Liu
- Applicant Address: TW Hsinchu
- Assignee: Winbond Electronics Corp.
- Current Assignee: Winbond Electronics Corp.
- Current Assignee Address: TW Hsinchu
- Agency: Jiang Chyun IP Office
- Priority: TW92106739A 20030326
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/336 ; H01L21/8242 ; H01L21/8247 ; H01L27/115 ; H01L29/788

Abstract:
A flash memory cell is described, including at least a substrate, a tunnel oxide layer, a floating gate, an insulating layer, a control gate and an inter-gate dielectric layer. The tunnel oxide layer is disposed on the substrate. The floating gate is disposed on the tunnel oxide layer, and is constituted by a first conductive layer on the tunnel oxide layer and a second conductive layer on the first conductive layer. The second conductive layer has a bottom lower than the top surface of the first conductive layer, and has a bowl-like cross section. The insulating layer is disposed between the floating gates, and each control gate is disposed on a floating gate with an inter-gate dielectric layer between them.
Public/Granted literature
- US20040191992A1 FLASH MEMORY CELL AND FABRICATION THEREOF Public/Granted day:2004-09-30
Information query
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