发明授权
US06912433B1 Determining a next tool state based on fault detection information
有权
根据故障检测信息确定下一个工具状态
- 专利标题： Determining a next tool state based on fault detection information
- 专利标题（中）： 根据故障检测信息确定下一个工具状态
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申请号： US10323554申请日： 2002-12-18
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公开(公告)号： US06912433B1公开(公告)日： 2005-06-28
- 发明人: Robert J. Chong , Michael L. Miller , Alexander J. Pasadyn , Eric O. Green
- 申请人： Robert J. Chong , Michael L. Miller , Alexander J. Pasadyn , Eric O. Green
- 申请人地址： US TX Austin
- 专利权人： Advanced Mirco Devices, Inc.
- 当前专利权人： Advanced Mirco Devices, Inc.
- 当前专利权人地址： US TX Austin
- 代理机构： Williams, Morgan & Amerson, P.C.
- 主分类号： G05B19/418
- IPC分类号： G05B19/418 ; G06F19/00
摘要：
A method and apparatus are provided for determining a next tool state based on fault detection information. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, determining at least a portion of noise associated with the processing of the workpiece based on analyzing the operational data and estimating a next state of the processing tool based on at least the determined portion of the noise.