发明授权
US06913972B2 Method of fabrication on a gate pattern of a non-volatile memory device
有权
在非易失性存储器件的栅极图案上的制造方法
- 专利标题: Method of fabrication on a gate pattern of a non-volatile memory device
- 专利标题(中): 在非易失性存储器件的栅极图案上的制造方法
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申请号: US09927594申请日: 2001-08-10
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公开(公告)号: US06913972B2公开(公告)日: 2005-07-05
- 发明人: Ja-hyung Han , Myung-sik Han , Kyung-hyun Kim , Chang-ki Hong
- 申请人: Ja-hyung Han , Myung-sik Han , Kyung-hyun Kim , Chang-ki Hong
- 申请人地址: KR Suwon
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR2000-82057 20001226
- 主分类号: H01L21/8247
- IPC分类号: H01L21/8247 ; H01L27/115 ; H01L29/788 ; H01L21/336
摘要:
A method for fabricating a non-volatile memory device is provided. The method for fabricating a non-volatile memory device includes the steps of: forming a gate pattern in which a first conductive layer is used as a floating gate, a second conductive layer is used as a control gate, the first conductive layer, a dielectric layer, and the second conductive layer are sequentially stacked on a semiconductor substrate; forming a polishing stopper on the gate pattern and the semiconductor substrate; forming an interlayer insulating layer on the polishing stopper; forming a common source line (CSL) by etching a portion of the interlayer insulating layer, and a portion of the polishing stopper, and depositing a conductive material to the etched portions; planarizing the common source line and the interlayer insulating layer until the surface of the polishing stopper is exposed; partially etching back the polishing stopper until the surface of the second conductive layer is exposed; and forming a silicide layer on the exposed second conductive layer and the common source line.
公开/授权文献
- US20020081796A1 Method for fabricating a non-volatile memory device 公开/授权日:2002-06-27
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