发明授权
- 专利标题: Semiconductor memory and method for fabricating the same
- 专利标题(中): 半导体存储器及其制造方法
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申请号: US10656153申请日: 2003-09-08
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公开(公告)号: US06916705B2公开(公告)日: 2005-07-12
- 发明人: Hisashi Ogawa , Yoshihiro Mori , Akihiko Tsuzumitani
- 申请人: Hisashi Ogawa , Yoshihiro Mori , Akihiko Tsuzumitani
- 申请人地址: JP Osaka
- 专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人: Matsushita Electric Industrial Co., Ltd.
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2001-218277 20010718
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; H01L21/02 ; H01L21/8242
摘要:
In a memory cell of a DRAM, that is, a semiconductor memory, a bit line connected to a bit line plug and a local interconnect are provided on a first interlayer insulating film. A connection conductor film of TiAlN is provided on the top and side faces of an upper barrier metal and side faces of a Pt film and a BST film. No contact is formed above the Pt film used for forming an upper electrode, and the upper electrode is connected to an upper interconnect (namely, a Cu interconnect) through the connection conductor film, a dummy lower electrode, a dummy cell plug and the local interconnect. Since the Pt film is not exposed to a reducing atmosphere, the characteristic degradation of a capacitor insulating film can be prevented.
公开/授权文献
- US20040056294A1 Semiconductor memory and method for fabricating the same 公开/授权日:2004-03-25
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