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发明授权
US06919161B2 Silicon-containing polymer, resist composition and patterning process 失效
含硅聚合物，抗蚀剂组合物和图案化工艺

Silicon-containing polymer, resist composition and patterning process
摘要：
Silicon-containing polymers comprising recurring units of formula (1) are novel wherein R1 is a single bond or alkylene, R2 is hydrogen or alkyl, R3, R4 and R5 are alkyl, haloalkyl, aryl or silicon-containing group, R6 is hydrogen, methyl, cyano or —C(═O)OR8 wherein R8 is hydrogen, alkyl or acid labile group, R7 is alkyl, —NR9R10 or —OR11 wherein R9, R10 and R11 are hydrogen or alkyl, a and b are positive numbers satisfying 0
摘要（中）：

包含式（1）的重复单元的含硅聚合物是新的，其中R 1是单键或亚烷基，R 2是氢或烷基，R 3 R 4，R 4和R 5是烷基，卤代烷基，芳基或含硅基团，R 6是氢，甲基， 氰基或-C（-O）OR 8，其中R 8为氢，烷基或酸不稳定基团，R 7为烷基，-NR 其中R 9，R 10和R 10和R 11和R 11独立地选自氢， α是氢或烷基，a和b是满足0

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