发明授权
US06920796B2 Device used for detecting clamping force of processed object and method thereof
有权
用于检测加工对象的夹紧力的装置及其方法
- 专利标题： Device used for detecting clamping force of processed object and method thereof
- 专利标题（中）： 用于检测加工对象的夹紧力的装置及其方法
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申请号： US10705939申请日： 2003-11-13
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公开(公告)号： US06920796B2公开(公告)日： 2005-07-26
- 发明人: Chih-Kun Chen , Yao-Hsiung Kung , Chung-Min Lin , Shan-Chang Wang , Jiun-Bo Wang
- 申请人： Chih-Kun Chen , Yao-Hsiung Kung , Chung-Min Lin , Shan-Chang Wang , Jiun-Bo Wang
- 申请人地址： TW Tao Yuan Hsien
- 专利权人： Nan Ya Technology Corporation
- 当前专利权人： Nan Ya Technology Corporation
- 当前专利权人地址： TW Tao Yuan Hsien
- 代理机构： Browdy and Neimark, P.L.L.C.
- 主分类号： G01L5/00
- IPC分类号： G01L5/00 ; H01L21/00 ; H01L21/687 ; G01N3/02
摘要：
A device used for detecting the clamping force of a processed object and a method thereof are proposed. The device comprises a detection unit, a basis component and a pressure detection component disposed on the basis component. The basis component having the pressure detection component is closely placed between pivotal rods so that the detection unit can detect variation of electric properties of the pressure detection component to adjust the spacing between the pivotal rods, hence facilitating adjustment of the clamping force.
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