公开(公告)号：US06920796B2

公开(公告)日：2005-07-26

申请号：US10705939

申请日：2003-11-13

申请人： Chih-Kun Chen ,  Yao-Hsiung Kung ,  Chung-Min Lin ,  Shan-Chang Wang ,  Jiun-Bo Wang

发明人： Chih-Kun Chen ,  Yao-Hsiung Kung ,  Chung-Min Lin ,  Shan-Chang Wang ,  Jiun-Bo Wang

IPC分类号： G01L5/00 ,  H01L21/00 ,  H01L21/687 ,  G01N3/02

CPC分类号： H01L21/67288 ,  G01L5/009 ,  H01L21/68707

摘要： A device used for detecting the clamping force of a processed object and a method thereof are proposed. The device comprises a detection unit, a basis component and a pressure detection component disposed on the basis component. The basis component having the pressure detection component is closely placed between pivotal rods so that the detection unit can detect variation of electric properties of the pressure detection component to adjust the spacing between the pivotal rods, hence facilitating adjustment of the clamping force.

摘要翻译： 提出了一种用于检测加工对象的夹持力的装置及其方法。 该装置包括检测单元，基础部件和设置在基础部件上的压力检测部件。 具有压力检测部件的基础部件紧密地放置在枢转杆之间，使得检测单元可以检测压力检测部件的电特性的变化，以调节枢转杆之间的间隔，从而有助于调节夹紧力。

公开(公告)号：US20050103121A1

公开(公告)日：2005-05-19

申请号：US10705939

申请日：2003-11-13

申请人： Chih-Kun Chen ,  Yao-Hsiung Kung ,  Chung-Min Lin ,  Shan-Chang Wang ,  Jiun-Bo Wang

发明人： Chih-Kun Chen ,  Yao-Hsiung Kung ,  Chung-Min Lin ,  Shan-Chang Wang ,  Jiun-Bo Wang

IPC分类号： G01L5/00 ,  H01L21/00 ,  H01L21/687 ,  G01N3/02

CPC分类号： H01L21/67288 ,  G01L5/009 ,  H01L21/68707

摘要： A device used for detecting the clamping force of a processed object and a method thereof are proposed. The device comprises a detection unit, a basis component and a pressure detection component disposed on the basis component. The basis component having the pressure detection component is closely placed between pivotal rods so that the detection unit can detect variation of electric properties of the pressure detection component to adjust the spacing between the pivotal rods, hence facilitating adjustment of the clamping force.

摘要翻译： 提出了一种用于检测加工对象的夹持力的装置及其方法。 该装置包括检测单元，基础部件和设置在基础部件上的压力检测部件。 具有压力检测部件的基础部件紧密地放置在枢转杆之间，使得检测单元可以检测压力检测部件的电特性的变化，以调节枢转杆之间的间隔，从而有助于调节夹紧力。