A compound of the general formula R1R2MR4R5 is disclosed wherein R1 and R2 are independently an aryl, alkyl, alkenyl, epoxy or alkynyl group, wherein at least one of R1 and R2 is fully or partially fluorinated, wherein M is selected from group 14 of the periodic table, wherein R4 and R5 are independently an alkoxy group, OR3, or a halogen group, X, except where M is Si, R4 and R5 are both ethoxy groups or both chlorine groups, and R1 and R2 are perfluorinated groups. This compound formed can be further reacted to attach an additional organic R group, and/or hydrolyzed, alone or with one or more similar compounds, to form a material having a molecular weight of from 500 to 10,000, which material can be deposited on various substrates as a coating or deposited and patterned for a waveguide or other optical device components. Methods for making compounds of the general formula R1MR4R5R6 are also disclosed.