发明授权
- 专利标题: Piezoelectric transducers utilizing sub-diaphragms
- 专利标题(中): 压电换能器采用副膜片
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申请号: US10319138申请日: 2002-12-13
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公开(公告)号: US06924584B2公开(公告)日: 2005-08-02
- 发明人: Steven A. Buhler , John S. Fitch , Meng H. Lean , Karl A. Littau
- 申请人: Steven A. Buhler , John S. Fitch , Meng H. Lean , Karl A. Littau
- 申请人地址: US CA Palo Alto
- 专利权人: Palo Alto Research Center Inc.
- 当前专利权人: Palo Alto Research Center Inc.
- 当前专利权人地址: US CA Palo Alto
- 代理商 Nola Mae McBain
- 主分类号: H01L41/09
- IPC分类号: H01L41/09 ; H01L41/113 ; H01L41/04
摘要:
A system and method of operation is described which utilizes an array of piezoelectric actuators distributed over the surface of a diaphragm. In one embodiment, the piezoelectric actuator array is used to cause a net motion of the diaphragm equal to the sum of the motions of each individual sub-chamber diaphragm. The system can be used as a sensor where a common motion applied to the sub-chamber diaphragm causes a net charge equal to the sum of the charges on each piezoelectric diaphragm.
公开/授权文献
- US20040113521A1 Piezoelectric transducers utilizing sub-diaphragms 公开/授权日:2004-06-17
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