发明授权
US06929959B2 Manufacturing method of CPP type magnetic sensor having current-squeezing path
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具有电流挤压路径的CPP型磁传感器的制造方法
- 专利标题: Manufacturing method of CPP type magnetic sensor having current-squeezing path
- 专利标题(中): 具有电流挤压路径的CPP型磁传感器的制造方法
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申请号: US10828120申请日: 2004-04-20
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公开(公告)号: US06929959B2公开(公告)日: 2005-08-16
- 发明人: Yoshihiro Nishiyama , Masamichi Saito , Daigo Aoki
- 申请人: Yoshihiro Nishiyama , Masamichi Saito , Daigo Aoki
- 申请人地址: JP Tokyo
- 专利权人: Alps Electric Co., Ltd.
- 当前专利权人: Alps Electric Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Brinks Hofer Gilson & Lione
- 优先权: JP2003-117751 20030423
- 主分类号: G11B5/39
- IPC分类号: G11B5/39 ; H01L43/08 ; H01L43/12 ; H01L21/00
摘要:
On a multilayer film formed on a lower electrode layer, a resist layer having cutaway parts at a lower portion is formed, and on parts of the upper surface of the multilayer film which are not overlapped with the resist layer except for areas inside the cutaway parts, first gap layers are formed. Accordingly, a predetermined gap T1 can be formed between the first gap layers in the track width direction. Next, in the following step, two end surfaces of the multilayer film and the first gap layers in the track width direction are milled. Hence, according to the present invention, compared to the case in the past, the predetermined gap T1 provided between the first gap layers can be formed into a minute size with superior accuracy, the current path-squeezing structure can be easily formed, and a magnetic sensor having superior change in resistance (ΔR) and reproduction output can be manufactured.
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