Invention Grant
- Patent Title: Microstructure with movable mass
- Patent Title (中): 具有移动质量的微结构
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Application No.: US10488490Application Date: 2002-09-02
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Publication No.: US06931928B2Publication Date: 2005-08-23
- Inventor: Hiroyuki Hashimoto , Takahiko Ooasa , Naoki Ikeuchi , Muneo Harada
- Applicant: Hiroyuki Hashimoto , Takahiko Ooasa , Naoki Ikeuchi , Muneo Harada
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Finnegan Henderson Farabow Garrett & Dunner, L.L.P.
- Priority: JP2001-266604 20010904; JP2002-244282 20020823; JP2002-244283 20020823
- International Application: PCT/JP02/08879 WO 20020902
- International Announcement: WO03/02341 WO 20030320
- Main IPC: B81B3/00
- IPC: B81B3/00 ; B81B7/00 ; G01C19/56 ; G01C19/5719 ; G01P15/08 ; G01P15/12 ; G01P15/18
Abstract:
A microstructure includes a mass; a base member in which the mass is movably contained. The mass includes a surface, which is exposed out of the base member, and a stopper wire, which is arranged above the surface of the mass so as to inhibit over move of the mass.
Public/Granted literature
- US20050016271A1 Microstructure with movable mass Public/Granted day:2005-01-27
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