发明授权
- 专利标题： Automatic calibration of a wafer-handling robot
- 专利标题（中）： 自动校准晶圆处理机器人
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申请号： US10600667申请日： 2003-06-20
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公开(公告)号： US06934606B1公开(公告)日： 2005-08-23
- 发明人: Damon Genetti , Wayne Tang , Mikhail Bojinov , Stephan Minard
- 申请人： Damon Genetti , Wayne Tang , Mikhail Bojinov , Stephan Minard
- 申请人地址： US CA San Jose
- 专利权人： Novellus Systems, Inc.
- 当前专利权人： Novellus Systems, Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： Okamoto & Benedicto LLP
- 主分类号： G05B19/00
- IPC分类号： G05B19/00 ; G05B19/18 ; H01L21/00 ; H01L21/673 ; H01L21/677 ; H01L21/68
摘要：
In one embodiment, a wafer-handling robot in a wafer processing system is automatically calibrated by determining an orientation of the robot relative to a chassis of the wafer processing system, determining hand-off coordinates of a load port in the wafer processing system, and determining hand-off coordinates of a load lock in the wafer processing system. Also disclosed is a calibration fixture for automatically calibrating the wafer-handling robot to the load port.
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